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<div class="moz-cite-prefix">Hi Scott,<br>
I have attached some scans of the schematics for the RF match
on one of our SPS ICP DRIE systems - they may be similar enough to
be of use. One issue we found was the ceramic bearing on the
capacitors central shaft - on the end furthest from the motor -
degraded over time and prevented the cap from moving freely and
would eventually cause the cap to fail completely. Also the
initial position (50%) of the capacitors has to be correct as they
can be placed 180° out of alignment and the match will never tune
correctly.<br>
<br>
- Donal Jamieson<br>
Research Specialist<br>
Microsystems Technology Laboratories<br>
<br>
On 8/10/2015 3:33 PM, Scott Blondell wrote:<br>
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<p class="MsoNormal">Does anyone have schematics, prints or
other maintenance docs available for this tool?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We’re having an RF tuning issue, with or
without a plasma or RF actually on. One of the variable tuning
caps is smooth in both directions<o:p></o:p></p>
<p class="MsoNormal">while the other cap seems to pulsate or
move in steps in one direction, while smooth in the other.
Through the computer, we can command
<o:p></o:p></p>
<p class="MsoNormal">the cap adjust motors to move between 0 and
99% of their travel, so observing the problem doesn’t require
the RF to be on.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We’ve done some component and PCB swaps
with no change. Has anyone experienced this or have any ideas?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span
style="font-size:16.0pt;font-family:"Times New
Roman",serif;color:#1F497D">Scott P. Blondell</span><span
style="font-size:16.0pt;font-family:"Times New
Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New
Roman",serif;color:#1F497D">Facilities Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New
Roman",serif;color:#1F497D">Rochester Institute of
Technology</span><span style="font-family:"Times New
Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a
moz-do-not-send="true" href="http://www.smfl.rit.edu/"
target="_blank"><span style="color:blue">Semiconductor
& Microsystems Fabrication Laboratory</span></a></span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-family:"Times New
Roman",serif;color:#1F497D">82 Lomb Memorial Dr.
</span><span style="font-family:"Times New
Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New
Roman",serif;color:#1F497D">Bldg. 17-2519</span><span
style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New
Roman",serif;color:#1F497D">Rochester, NY 14623<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">585 738-4073 c</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">585 475-2171 o<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">585 475-5041 f<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a
moz-do-not-send="true" href="mailto:spb1699@rit.edu"><span
style="color:blue"><a class="moz-txt-link-abbreviated" href="mailto:spb1699@rit.edu">spb1699@rit.edu</a></span></a></span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"><a
moz-do-not-send="true" href="http://www.smfl.rit.edu"><span
style="color:blue"><a class="moz-txt-link-abbreviated" href="http://www.smfl.rit.edu">www.smfl.rit.edu</a></span></a><o:p></o:p></span></p>
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