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panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
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--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">We have a high flow system with a 250 gallon buffer tank for our house vacuum system. We use EBARA Dry Pumps EV-A10-3 running for 2 years with no issues. We
went dry to eliminate oil leaks of our rotary pumps and we reduced the noise by 50%<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Rick<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">555 Technology Square<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Bryant Colwill<br>
<b>Sent:</b> Wednesday, August 12, 2015 12:54 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Facility Process Vac<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Colleagues,<br>
<br>
We are in need of repairing/replacing our cleanroom process vacuum pumps.<br>
Currently, we use a water sealed rotary vane system but it has been suggested to convert to a oil sealed rotary screw style pump.<br>
We target an ultimate vacuum of 28mmHg and our volume requirements, at point of use, are quite small (a couple spin chucks, end effectors, etc.). Can anyone attest to having a rotary screw pump installed for this purpose that has withstood the test of time?
Any issues with premature/frequent bearing failure or replacement? Also, does changing from water sealed to oil sealed set off any red flags?
<br>
<br>
Thanks in advance,<br>
Bryant<br>
<br>
<span style="color:#888888">Bryant Colwill <br>
MNCR General Manager<br>
Rensselaer Polytechnic Institute <br>
110 8th Street, CII 6015 <br>
Troy, NY 12180 <br>
Ph: <a href="tel:518-276-3946" target="_blank">518-276-3946</a> </span><o:p></o:p></p>
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