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<div style="direction: ltr;font-family: Tahoma;color: #000000;font-size: 10pt;">We also use crystal bond and some folks like to use photoresist.<br>
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<p>Cheers!</p>
<p><br>
</p>
<p>Julia Aebersold, Ph.D.</p>
<p>MNTC Cleanroom Manager</p>
<p>University of Louisville</p>
<p>2210 South Brook Street</p>
<p>Shumaker Research Building, Room 233</p>
<p>Louisville, KY 40292</p>
<p> </p>
<p>(502) 852-1572</p>
<p><a tabindex="0" href="http://louisville.edu/micronano">http://louisville.edu/micronano/</a></p>
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<div id="divRpF933280" style="direction: ltr;"><font face="Tahoma" size="2" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu [labnetwork-bounces@mtl.mit.edu] on behalf of Noah Clay [nclay@upenn.edu]<br>
<b>Sent:</b> Saturday, August 15, 2015 10:40 AM<br>
<b>To:</b> Mariusz Martyniuk<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Cool grease used in DRIE<br>
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<div>Savitha,</div>
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<div>We use crystalbond in our SPTS Rapier, typical chuck temperature -5C to 20C.</div>
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<div>Noah Clay </div>
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<div>Quattrone Nanofabrication Facility </div>
<div>University of Pennsylvania </div>
<div>Philadelphia, PA</div>
<div><br>
<br>
Sent from my iPhone</div>
<div><br>
On Aug 15, 2015, at 04:00, Mariusz Martyniuk <<a href="mailto:mariusz.martyniuk@uwa.edu.au" target="_blank">mariusz.martyniuk@uwa.edu.au</a>> wrote:<br>
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<div>Fomblin oil or gallium. </div>
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<div id="composer_signature"><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="color:black">Mariusz Martyniuk<br>
</span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="font-size:10.0pt; color:black">-----------------------------</span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="color:black"><br>
</span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="font-size:10.0pt; color:black">Associate Professor, ANFF-WA Managing Director<br>
Microelectronics Research Group<br>
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018<br>
The University of Western Australia<br>
<a href="UrlBlockedError.aspx" target="_blank"><span style="color:black; text-decoration:none">35 Stirling Highway, Crawley WA 6009, Australia</span></a><br>
Tel: <a href="tel:+61%208%206488%201905" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 1905</span></a>, Fax: <a href="tel:+61%208%206488%201095" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 1095</span></a><br>
Secretary Tel: <a href="tel:+61%208%206488%203801" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 3801</span></a>, Rm 1.73, <a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__mrg.ee.uwa.edu.au_&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=glBzB3ThRd-n6JDi4l7HdZbROd4etVNY8vVIkzS4S6I&s=ergD4KsbQRhyfR63nGOZ8qhVfCJ0-XTHpITGnbINGZY&e=" target="_blank"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> <span style="color:black; text-decoration:none">http://mrg.ee.uwa.edu.au</span></a></span></span></div>
<br>
<br>
-------- Original message --------<br>
From: <a href="mailto:savitha.p@ece.iisc.ernet.in" target="_blank">savitha.p@ece.iisc.ernet.in</a>
<br>
Date: 15/08/2015 08:50 (GMT+08:00) <br>
To: <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>
<br>
Subject: Re: [labnetwork] Cool grease used in DRIE <br>
<br>
<font size="2">
<div class="PlainText">Hi!<br>
<br>
Currently we are using cool grease for sticking small samples to carrier<br>
wafers for DRIE processing.Is there any other method that can be used,<br>
instead of cool grease to stick small samples? We are finding it very<br>
difficult to remove the cool grease.<br>
<br>
Thanks and regards,<br>
<br>
Savitha<br>
<br>
___________________________________________________________<br>
<br>
Dr.Savitha P,<br>
Technology Manager<br>
National Nanofabrication Centre,<br>
Centre for Nanoscience and Engineering<br>
Indian Institute of Science<br>
Bangalore - 560012<br>
India.<br>
Ph: +91 80 2293 3254<br>
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