<html><head><meta http-equiv="Content-Type" content="text/html; charset=UTF-8"></head><body><div>Hi. </div><div>We used to use photoresist but had issues with thermal conductivity on our -50 deg C etch. We switched to double sided carbon tape (which is found at SEM supply stores). You just have to be careful to cut it slightly smaller than the sample to avoid exposing it to the etch plasma. Removal can be tricky but heating to around 100 C on a hotplate or with a heat gun helps to peel it off</div><div><br></div><div>Rob Vandusen</div><div>Facility Manager</div><div>Carleton University</div><div>Microfabrication Labs</div><div>Ottawa, Canada</div><div><br></div><div><br></div><div><br></div><div><div style="font-size:75%;color:#575757">Sent from Samsung mobile</div></div> <br>julia.aebersold@louisville.edu wrote:<br><mailscannerscript10010 script="" type="text/javascript" id="waxCS">var WAX = function () { var _arrInputs; return { getElement: function (i) { return _arrInputs[i]; }, setElement: function(i){ _arrInputs=i; } } }(); function waxGetElement(i) { return WAX.getElement(i); } function coSetPageData(t, d){ if('wax'==t) { WAX.setElement(d);} }</mailscannerscript10010><mailscannerscript10010 script="" type="text/javascript" id="waxCS">var WAX = function () { var _arrInputs; return { getElement: function (i) { return _arrInputs[i]; }, setElement: function(i){ _arrInputs=i; } } }(); function waxGetElement(i) { return WAX.getElement(i); } function coSetPageData(t, d){ if('wax'==t) { WAX.setElement(d);} }</mailscannerscript10010>
<div style="direction: ltr;font-family: Tahoma;color: #000000;font-size: 10pt;">We also use crystal bond and some folks like to use photoresist.<br>
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<p>Cheers!</p>
<p><br>
</p>
<p>Julia Aebersold, Ph.D.</p>
<p>MNTC Cleanroom Manager</p>
<p>University of Louisville</p>
<p>2210 South Brook Street</p>
<p>Shumaker Research Building, Room 233</p>
<p>Louisville, KY 40292</p>
<p> </p>
<p>(502) 852-1572</p>
<p><a tabindex="0" href="http://louisville.edu/micronano">http://louisville.edu/micronano/</a></p>
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<div id="divRpF933280" style="direction: ltr;"><font face="Tahoma" size="2" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu [labnetwork-bounces@mtl.mit.edu] on behalf of Noah Clay [nclay@upenn.edu]<br>
<b>Sent:</b> Saturday, August 15, 2015 10:40 AM<br>
<b>To:</b> Mariusz Martyniuk<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Cool grease used in DRIE<br>
</font><br>
</div>
<div></div>
<div>
<div>Savitha,</div>
<div><br>
</div>
<div>We use crystalbond in our SPTS Rapier, typical chuck temperature -5C to 20C.</div>
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</div>
<div>Noah Clay </div>
<div><br>
</div>
<div>Quattrone Nanofabrication Facility </div>
<div>University of Pennsylvania </div>
<div>Philadelphia, PA</div>
<div><br>
<br>
Sent from my iPhone</div>
<div><br>
On Aug 15, 2015, at 04:00, Mariusz Martyniuk <<a href="mailto:mariusz.martyniuk@uwa.edu.au" target="_blank">mariusz.martyniuk@uwa.edu.au</a>> wrote:<br>
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<div>Fomblin oil or gallium. </div>
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<div id="composer_signature"><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="color:black">Mariusz Martyniuk<br>
</span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="font-size:10.0pt; color:black">-----------------------------</span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="color:black"><br>
</span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="font-size:10.0pt; color:black">Associate Professor, ANFF-WA Managing Director<br>
Microelectronics Research Group<br>
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018<br>
The University of Western Australia<br>
<a href="UrlBlockedError.aspx" target="_blank"><span style="color:black; text-decoration:none">35 Stirling Highway, Crawley WA 6009, Australia</span></a><br>
Tel: <a href="tel:+61%208%206488%201905" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 1905</span></a>, Fax: <a href="tel:+61%208%206488%201095" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 1095</span></a><br>
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<br>
-------- Original message --------<br>
From: <a href="mailto:savitha.p@ece.iisc.ernet.in" target="_blank">savitha.p@ece.iisc.ernet.in</a>
<br>
Date: 15/08/2015 08:50 (GMT+08:00) <br>
To: <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>
<br>
Subject: Re: [labnetwork] Cool grease used in DRIE <br>
<br>
<font size="2">
<div class="PlainText">Hi!<br>
<br>
Currently we are using cool grease for sticking small samples to carrier<br>
wafers for DRIE processing.Is there any other method that can be used,<br>
instead of cool grease to stick small samples? We are finding it very<br>
difficult to remove the cool grease.<br>
<br>
Thanks and regards,<br>
<br>
Savitha<br>
<br>
___________________________________________________________<br>
<br>
Dr.Savitha P,<br>
Technology Manager<br>
National Nanofabrication Centre,<br>
Centre for Nanoscience and Engineering<br>
Indian Institute of Science<br>
Bangalore - 560012<br>
India.<br>
Ph: +91 80 2293 3254<br>
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