<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto"><div>Savitha,</div><div><br></div><div>We use crystalbond in our SPTS Rapier, typical chuck temperature -5C to 20C.</div><div><br></div><div>Noah Clay </div><div><br></div><div>Quattrone Nanofabrication Facility </div><div>University of Pennsylvania </div><div>Philadelphia, PA</div><div><br><br>Sent from my iPhone</div><div><br>On Aug 15, 2015, at 04:00, Mariusz Martyniuk <<a href="mailto:mariusz.martyniuk@uwa.edu.au">mariusz.martyniuk@uwa.edu.au</a>> wrote:<br><br></div><blockquote type="cite"><div>
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<div>Fomblin oil or gallium. </div><div><br></div><div id="composer_signature"><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="color:black">Mariusz Martyniuk<br></span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="font-size:10.0pt; color:black">-----------------------------</span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="color:black"><br></span></span><span class="Apple-style-span" style="font-family:Calibri,sans-serif; font-size:15px"><span lang="EN-US" style="font-size:10.0pt; color:black">Associate Professor, ANFF-WA Managing Director<br>Microelectronics Research Group<br>School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018<br>The University of Western Australia<br><a href=""><span style="color:black; text-decoration:none">35 Stirling Highway, Crawley WA 6009, Australia</span></a><br>Tel: <a href="tel:+61%208%206488%201905"><span style="color:black; text-decoration:none">+61 8 6488 1905</span></a>, Fax: <a href="tel:+61%208%206488%201095"><span style="color:black; text-decoration:none">+61 8 6488 1095</span></a><br>Secretary Tel: <a href="tel:+61%208%206488%203801"><span style="color:black; text-decoration:none">+61 8 6488 3801</span></a>, Rm 1.73, <a href="http://mrg.ee.uwa.edu.au/" target="_BLANK"><span style="color:black; text-decoration:none">http://mrg.ee.uwa.edu.au</span></a></span></span></div><br><br>-------- Original message --------<br>From: <a href="mailto:savitha.p@ece.iisc.ernet.in">savitha.p@ece.iisc.ernet.in</a> <br>Date: 15/08/2015 08:50 (GMT+08:00) <br>To: <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a> <br>Subject: Re: [labnetwork] Cool grease used in DRIE <br><br>
<font size="2"><div class="PlainText">Hi!<br>
<br>
Currently we are using cool grease for sticking small samples to carrier<br>
wafers for DRIE processing.Is there any other method that can be used,<br>
instead of cool grease to stick small samples? We are finding it very<br>
difficult to remove the cool grease.<br>
<br>
Thanks and regards,<br>
<br>
Savitha<br>
<br>
___________________________________________________________<br>
<br>
Dr.Savitha P,<br>
Technology Manager<br>
National Nanofabrication Centre,<br>
Centre for Nanoscience and Engineering<br>
Indian Institute of Science<br>
Bangalore - 560012<br>
India.<br>
Ph: +91 80 2293 3254<br>
<a href="http://www.cense.iisc.ernet.in">www.cense.iisc.ernet.in</a><br>
<br>
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