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<p class="MsoNormal">We had request from a user group to deposit Chromium Oxide using CrO2Cl2 using the Atomic Layer Deposition (ALD).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Due to the highly oxidizing nature and toxicity I am worried to use this precursor in our ALD<o:p></o:p></p>
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<p class="MsoNormal">Do anyone have used CrO2Cl2 in your facility if so what sort of precautions you followed and what type of pumps or other requirements needed.<o:p></o:p></p>
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<p class="MsoNormal">-Thanks<o:p></o:p></p>
<p class="MsoNormal">-Shiva<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Shivakumar Bhaskaran, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">https://searle-cleanroom.uchicago.edu/<o:p></o:p></span></p>
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