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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">We do not have LED in our cleanroom, but I have heard that it is difficult to see thickness fringes in this kind of light. Another cleanroom (Electrum
in Stockholm) installed LED in their EBL area, but had to reinstall some “normal” light sources after requests from the operators.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#17365D">Ida Noddeland<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#212121"> <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:8.0pt;font-family:"Calibri","sans-serif";color:#95B3D7">Head of Laboratory</span><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:8.0pt;font-family:"Calibri","sans-serif";color:#95B3D7">NTNU NanoLab</span><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:8.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"> </span><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Calibri","sans-serif";color:#95B3D7">Sem Sælands vei 14, K1-123</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Calibri","sans-serif";color:#95B3D7">7491 Trondheim</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Calibri","sans-serif";color:#95B3D7">+47 41288808</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><a href="http://www.ntnu.no/nanolab"><span style="color:#95B3D7">www.ntnu.no/nanolab</span></a></span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#95B3D7"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Noah Clay<br>
<b>Sent:</b> Tuesday, September 22, 2015 11:52 PM<br>
<b>To:</b> Tribble, Thomas A.<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?<o:p></o:p></span></p>
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<p class="MsoNormal">Tom,<o:p></o:p></p>
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<p class="MsoNormal">We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech. As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further information.
The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community. For the time being, the overhead cleanroom lighting at Penn is fluorescent.<o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal">Noah<o:p></o:p></p>
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<p class="MsoNormal"><i>Quattrone Nanofabrication Facility</i><o:p></o:p></p>
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<p class="MsoNormal"><i>University of Pennsylvania</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Philadelphia, PA</i><o:p></o:p></p>
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<p class="MsoNormal">On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. <<a href="mailto:tribble@fas.harvard.edu">tribble@fas.harvard.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice. Has there been any experience with this kind
of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Thanks . . . Tom<o:p></o:p></span></p>
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<p class="MsoNormal" align="center" style="text-align:center"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="MsoNormal" align="center" style="text-align:center"><b><span style="font-size:10.0pt;font-family:"Leelawadee","sans-serif";color:#365F91">Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell)
617 780 5685 |</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica","sans-serif"">_______________________________________________<br>
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