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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hello Tom,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">A couple of years ago, we considered to replace the fluorescent lamp by the LED lamps in clean room. Before we made decision, we got the spectrums of both the
LED lamp and the GE fluorescent lamp, and compared them. There is a broad peak close to 450~460 nm besides the broad, main peak around 600 nm in the LED lamp although the intensity in 450 nm is weak. In the fluorescent lamp, the wavelengths of most of the
peaks are more than 540 nm. But we still can see the weak peaks around 400~420nm. The issue may be solved If lamps are covered by filters. But we didn’t do the further test.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Donghai Zhu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Keck Photonics Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Southern California<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Ida Noddeland<br>
<b>Sent:</b> Tuesday, September 22, 2015 11:49 PM<br>
<b>To:</b> Noah Clay <nclay@seas.upenn.edu>; Tribble, Thomas A. <tribble@fas.harvard.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We do not have LED in our cleanroom, but I have heard that it is difficult to see thickness fringes in this kind of light. Another cleanroom (Electrum in Stockholm)
installed LED in their EBL area, but had to reinstall some “normal” light sources after requests from the operators.</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Best regards,</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#17365D">Ida Noddeland</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#212121"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Calibri",sans-serif;color:#95B3D7">Head of Laboratory</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Calibri",sans-serif;color:#95B3D7">NTNU NanoLab</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Calibri",sans-serif;color:#95B3D7"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NO-BOK" style="font-size:8.0pt;font-family:"Calibri",sans-serif;color:#95B3D7">Sem Sælands vei 14, K1-123</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NO-BOK" style="font-size:8.0pt;font-family:"Calibri",sans-serif;color:#95B3D7">7491 Trondheim</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NO-BOK" style="font-size:8.0pt;font-family:"Calibri",sans-serif;color:#95B3D7">+47 41288808</span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NO-BOK" style="font-size:8.0pt;font-family:"Calibri",sans-serif;color:#95B3D7"><a href="http://www.ntnu.no/nanolab"><span style="color:#95B3D7">www.ntnu.no/nanolab</span></a></span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NO-BOK" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Noah Clay<br>
<b>Sent:</b> Tuesday, September 22, 2015 11:52 PM<br>
<b>To:</b> Tribble, Thomas A.<br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?</span><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK"> <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="NO-BOK">Tom,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK">We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech. As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further
information. The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community. For the time being, the overhead cleanroom lighting at Penn is fluorescent.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK">Thanks,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK">Noah<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK"> <o:p></o:p></span></p>
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<p class="MsoNormal"><i><span lang="NO-BOK">Quattrone Nanofabrication Facility</span></i><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span lang="NO-BOK">University of Pennsylvania</span></i><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span lang="NO-BOK">Philadelphia, PA</span></i><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK">On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. <<a href="mailto:tribble@fas.harvard.edu">tribble@fas.harvard.edu</a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK" style="font-size:11.0pt;font-family:"Calibri",sans-serif">The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice. Has there been any experience
with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps?</span><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Thanks . . . Tom</span><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal" align="center" style="text-align:center"><span lang="NO-BOK" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
<p class="MsoNormal" align="center" style="text-align:center"><b><span lang="NO-BOK" style="font-size:10.0pt;font-family:"Leelawadee",sans-serif;color:#365F91">Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495
0990 |(cell) 617 780 5685 |</span></b><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span><span lang="NO-BOK"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK" style="font-size:9.0pt;font-family:"Helvetica",sans-serif">_______________________________________________<br>
labnetwork mailing list<br>
</span><span lang="NO-BOK"><a href="mailto:labnetwork@mtl.mit.edu"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:purple">labnetwork@mtl.mit.edu</span></a></span><span lang="NO-BOK" style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><br>
</span><span lang="NO-BOK"><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:purple">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="NO-BOK"> <o:p></o:p></span></p>
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