<html><head><meta http-equiv="Content-Type" content="text/html charset=us-ascii"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">Hello,<div class=""><br class=""></div><div class="">Does anyone have experience with PVD of Yttrium Boride, YB66 specifically. I am reluctant use it in our tools because the research group cannot come up with a MSDS for this material nor do I know how it will effect other processes in our system. Besides possible health concerns is boron a significant concern for cross contamination?</div><div class=""><br class=""></div><div class="">thanks</div><div class="">phil</div><div class=""><br class=""></div><br class=""><div apple-content-edited="true" class="">
<div style="color: rgb(0, 0, 0); letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class=""><div class=""><div class="">Dr. Phillip Himmer</div><div class="">Manager Montana Microfabrication Facility</div><div class="">Montana State University</div><div class="">Bozeman Mt 59717</div><div class=""><br class=""></div><div class="">Office Ph: 406-994-7178</div><div class="">email:<span class="Apple-tab-span" style="white-space: pre;"> </span><a href="mailto:philh@ece.montana.edu" class="">philh@ece.montana.edu</a></div></div></div><br class="Apple-interchange-newline"><br class="Apple-interchange-newline">
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