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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Vito,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> When we were faced with some situations like this, we always look to block a function that will not cause an alarm on the system. In the case of contact
aligners, I would put a solenoid valve on the air line that opens the shutter. If your interlock system just provides dry contacts, you will have to use a relay and separate power source to operate it.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Equipment Dood<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Harvard Center for Nanoscale Systems<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Vito Logiudice<br>
<b>Sent:</b> Monday, October 26, 2015 4:43 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Suggestions for interlocking mask aligners<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Dear Colleagues,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">I would appreciate hearing how you may have interlocked the mask aligners in your respective facilities. In our particular case we have a Suss-Microtec MA6 aligner
and we are struggling to identify a parameter that can be interlocked without causing the system additional wear and tear. Any insights would be appreciated. Thank you.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Best regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Vito<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">--</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Vito Logiudice P.Eng.</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Director of Operations, Quantum NanoFab</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">University of Waterloo</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Lazaridis QNC 1207</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">200 University Avenue West</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Waterloo, ON Canada N2L 3G1</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Tel.: (519) 888-4567 ext. 38703</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Email: <a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a></span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Website: </span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__fab.qnc.uwaterloo.ca&d=CwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=JBLB6qHiWO8yeqC39SH95uOiCB8DgrJDUmJD9XLZbyk&s=YY6II-7ryKy-84wkPWLu0PYIHIy6ozbdzrL0770beB8&e="><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> https://fab.qnc.uwaterloo.ca</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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