<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=us-ascii"><meta name=Generator content="Microsoft Word 14 (filtered medium)"><!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
span.EmailStyle19
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.EmailStyle20
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:black;}
span.EmailStyle21
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:black;}
span.EmailStyle22
{mso-style-type:personal-reply;
font-family:"Times New Roman","serif";
color:#1F497D;
font-weight:normal;
font-style:normal;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:85.05pt 56.7pt 85.05pt 56.7pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>One possible solution is to use remote login programs.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>Remote login programs like Logmein and TeamViewer allow users to log into remote computers and lock out the keyboard, mouse and monitor.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>If the equipment laptop is connected to the internet, you can connect to the laptop (or any computer for that matter) from any other computer.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>TeamViewer will allow you to remotely lock the computer as well as any local input devices on the computer, including the keyboard, trackpad & mouse.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>TeamViewer is free for use and has apps for Windows, Mac, Android and iOS.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>So it can used on any computer, laptop, phone or tablet.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>Also, it can connect to multiple computers from one computer, so it is possible to control and lock more than one piece of equipment.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>I’m not sure if there is a connection limitation with the free usage.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><img width=629 height=354 id="Picture_x0020_1" src="cid:image002.jpg@01D1119F.3D354AB0"></span><span style='font-size:14.0pt;color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>Hiren Trada, Ph.D.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'>University of Louisville<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:14.0pt;color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Shivakumar Bhaskaran<br><b>Sent:</b> Wednesday, October 28, 2015 1:06 PM<br><b>To:</b> Vito Logiudice<br><b>Cc:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> Re: [labnetwork] Suggestions for interlocking mask aligners<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>Hello Vito,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>Sorry I should have mentioned more clearly. For example one of my tool I am planning to turn off/on the computer screen using the relay. <o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>But for laptop I cant turn off/on the screen using relay or activate the screen using relay. May be I am wrong,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>I checked with outside vendor regarding this but he mentioned it can be done, but it involves quite an effort to be done, there is also code to just turn off/on the laptop screen, but I couldn’t find with the relay.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>-Thanks<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>-Shiva<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Shivakumar Bhaskaran, Ph.D.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Searle CleanRoom Manager<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>The University of Chicago<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>5735 S.Ellis, Room 032<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Chicago-60637<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Ph:773-795-2297<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'><a href="https://searle-cleanroom.uchicago.edu/">https://searle-cleanroom.uchicago.edu/</a><o:p></o:p></span></p></div><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri","sans-serif"'>From:</span></b><span style='font-size:11.0pt;font-family:"Calibri","sans-serif"'> Vito Logiudice [<a href="mailto:vito.logiudice@uwaterloo.ca">mailto:vito.logiudice@uwaterloo.ca</a>] <br><b>Sent:</b> Wednesday, October 28, 2015 11:52 AM<br><b>To:</b> Shivakumar Bhaskaran <<a href="mailto:sbhas@uchicago.edu">sbhas@uchicago.edu</a>><br><b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> Re: Suggestions for interlocking mask aligners<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><div><div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>Hello Shiva,<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>If I’m not mistaken some laptops can be configured to remain active even when the monitor is folded over to the closed position. In this position the monitor will turn off but the CPU will remain in operation which I think would solve your problem. Perhaps you can have someone in your local IT department have a look at your particular laptops to see if they can be configured this way.<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>Best regards,<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>Vito<o:p></o:p></span></p></div><div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p></div></div></div></div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>From: </span></b><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>Shivakumar Bhaskaran <<a href="mailto:sbhas@uchicago.edu">sbhas@uchicago.edu</a>><br><b>Date: </b>Wednesday, October 28, 2015 at 12:30 PM<br><b>To: </b>Leif Johansen <<a href="mailto:lej@danchip.dtu.dk">lej@danchip.dtu.dk</a>>, Vito Logiudice <<a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a>>, "<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>" <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br><b>Subject: </b>RE: Suggestions for interlocking mask aligners<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'><o:p> </o:p></span></p></div><div><div><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>Hello All,</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>Since you all are exchanging emails regarding the interlock, I myself planning to do in my facility. I was able to figure out for some of the tool that I have. But two of my tool is hooked up to laptop, if I shutdown the laptop or close the lid of the laptop the software stops working and then the vacuum valve or heater shuts off which I don’t want to have like this. I don’t want to add computer screen or load the software in desktop due to space constraint. </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>The two tools that I am having are one is Arradiance Gemstar ALD and another is PE 100 O2 plasma etch. I don’t want to pump to be turned off/on using relay, because I want the system to in vacuum even if its not in use.</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>-Thanks</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>-Shiva</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p><div><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Shivakumar Bhaskaran, Ph.D.</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Searle CleanRoom Manager</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>The University of Chicago</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>5735 S.Ellis, Room 032</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Chicago-60637</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'>Ph:773-795-2297</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;color:black'><a href="https://searle-cleanroom.uchicago.edu/">https://searle-cleanroom.uchicago.edu/</a></span><span style='color:black'><o:p></o:p></span></p></div><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'>From:</span></b><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:black'> <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Leif Johansen<br><b>Sent:</b> Wednesday, October 28, 2015 9:47 AM<br><b>To:</b> 'Vito Logiudice' <<a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a>>; <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> Re: [labnetwork] Suggestions for interlocking mask aligners</span><span style='color:black'><o:p></o:p></span></p></div></div><p class=MsoNormal><span style='color:black'> <o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Hello Vito, </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>At DTU Danchip we have two MA-6 aligners. On both tools we have interlocked the electrical signal for the solenoid controlling the CDA for the shutter. It works fine. If you want, we can mail you some pictures of how we did it. </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Of course, if a user really wanted to cheat, he or she could perform all work before the exposure (i.e. mask load, wafer load and alignment) without logging in, and then only log in during exposure. In reality, we do not see such misuse. </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Best regards, </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Leif</span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'> </span><span style='color:black'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'> </span><span style='color:black'><o:p></o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black'><a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Vito Logiudice<br><b>Sent:</b> 26. oktober 2015 21:43<br><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> [labnetwork] Suggestions for interlocking mask aligners</span><span style='color:black'><o:p></o:p></span></p></div></div><p class=MsoNormal><span style='color:black'> <o:p></o:p></span></p><div><p class=MsoNormal><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>Dear Colleagues,</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>I would appreciate hearing how you may have interlocked the mask aligners in your respective facilities. In our particular case we have a Suss-Microtec MA6 aligner and we are struggling to identify a parameter that can be interlocked without causing the system additional wear and tear. Any insights would be appreciated. Thank you.</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>Best regards,</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'>Vito</span><span style='color:black'><o:p></o:p></span></p></div><div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>--</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>Vito Logiudice P.Eng.</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>Director of Operations, Quantum NanoFab</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>University of Waterloo</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>Lazaridis QNC 1207</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>200 University Avenue West</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>Waterloo, ON Canada N2L 3G1</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>Tel.: (519) 888-4567 ext. 38703</span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>Email: <a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a></span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:10.5pt;font-family:"Calibri","sans-serif";color:black'>Website: </span><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'><a href="https://fab.qnc.uwaterloo.ca">https://fab.qnc.uwaterloo.ca</a></span><span style='color:black'><o:p></o:p></span></p></div><div><p class=MsoNormal><span lang=DA style='font-size:11.5pt;font-family:"Calibri","sans-serif";color:black'> </span><span style='color:black'><o:p></o:p></span></p></div></div></div></div></div></body></html>