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<p>Shiva,</p>
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<p>We have a 10 yr old AJA sputtering system, which uses a chain drive for the LL transfer and wafer holder positioning. This spring we replaced all the bearings in the chain drive, which made a major difference in the ease of loading. We got the bearings
from McAllister Technical Service, who made the chain drive. With the bearings they sent a tube of MoS2 grease. We have been using this grease on both the bearings and chain.</p>
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<p>Jim McVittie</p>
<p>Stanford Nanofabrication Facility</p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" color="#000000" style="font-size:11pt"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Paolini, Steven <spaolini@cns.fas.harvard.edu><br>
<b>Sent:</b> Thursday, October 29, 2015 3:02 PM<br>
<b>To:</b> Shivakumar Bhaskaran; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Lubricating the Ball Bearings/Chains</font>
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<span style="color:#1F497D">Shiva,</span></p>
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<span style="color:#1F497D"> My first reaction upon reading your post was to try to convince you NOT to put any sort of lubricant into the chamber if you can avoid it by re-aligning or replacing components. If it is a vacuum system, you will suffer the
effects of outgassing if lubricant is introduced and contamination is a concern as well. If you find that you have to use a lubricant, my suggestion would be to lube the slides only with an inert PFPE lubricant that does not react with other chemicals or
provide any dopant, these products usually have a high temperature tolerance but can form toxic compounds if heated over 300 Deg. C. If you need to heat above this temperature, the next step would be the use of silicone grease. I suggest sparingly lubricating
the slides only since chains can run dry if they remain clean.</span></p>
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<span style="color:#1F497D">Best of luck,</span></p>
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<span style="color:#1F497D">Steve Paolini</span></p>
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<span style="color:#1F497D">Equipment Dood</span></p>
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<span style="color:#1F497D">Harvard Center for Nanoscale systems.</span></p>
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<span style="color:#1F497D"> </span></p>
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<b><span style="font-size:10.0pt; font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt; font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Shivakumar Bhaskaran<br>
<b>Sent:</b> Thursday, October 29, 2015 1:16 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Lubricating the Ball Bearings/Chains</span></p>
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In one of the equipment the sample stage which moves up and down from loading the sample in deposition chamber is making noise. The sample stage has chains with motor and bearings/sliders to move up and down. I think if I add lubricant the noise can be reduced.
As this system might be baked to high temperature, I want to know what sort of lubricants to you use in the cleanroom for your equipment, I want to make sure the grease wont dry out during baking or atleast I don’t want to add the lubricant every time I bake.</p>
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-Thanks</p>
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-Shiva</p>
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<span style="font-size:10.0pt; font-family:"Times New Roman","serif"">Shivakumar Bhaskaran, Ph.D.</span></p>
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<span style="font-size:10.0pt; font-family:"Times New Roman","serif"">Searle CleanRoom Manager</span></p>
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<span style="font-size:10.0pt; font-family:"Times New Roman","serif"">The University of Chicago</span></p>
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<span style="font-size:10.0pt; font-family:"Times New Roman","serif"">Ph:773-795-2297</span></p>
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