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<div>Hi Vito,</div>
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<div id="AppleMailSignature">A couple of years ago we scribed and cleaved a few 2" sapphire wafers that were around 300um thick. This was done with a dynatex II scribe & break machine that I guess is around 15 years old. Had to use quite high scribing and breaking
force (I can check numbers if interested) but it worked fine. The diamond scribe tool would probably not last very long but since we only scribed a few wafers we didn't have any issues with that. Also, never checked sidewalls so don't know if they were smooth
or not... Hope this helps anyway!<br>
<br>
<span style="font-size: 13pt;">Regards,</span><br>
<div>Espen Rogstad</div>
<div>Senior Engineer</div>
<div>NTNU NanoLab</div>
<div><br>
</div>
<div>-------------------------</div>
<div>Sem Sælands vei 14, K1-113</div>
<div>NO-7491 Trondheim, Norway</div>
<div>Tlf: +47 95285642</div>
<div><a href="http://www.ntnu.no/nanolab">http://www.ntnu.no/nanolab</a></div>
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<div><br>
Den 7. nov. 2015 kl. 15.17 skrev Christopher Raum <<a href="mailto:crraum@gmail.com">crraum@gmail.com</a>>:<br>
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<div>Hi Vito,<br>
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I've had success scribing across the length of the desired cleave location and then using the length of a hex key (1 to 2 mm) to provide a fulcrum under the scribe line. Then by placing finger tips on either side of the scribe (freshly trimmed fingernails help),
push down evenly over the hex key edge. By placing a gentle but steadily increasing pressure I've been able to successfully cleave fused quartz wafers (100 to 500 um thick) this way.<br>
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<div>This technique is heavily operator dependent and not suitable for large volume, but if you just need some experimental samples prepared it's a useful technique.<br>
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Good luck!<br>
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-Chris<br>
--<br>
Christopher Raum, PhD.<br>
R&D Engineer<br>
Experimental Cosmology Group<br>
Radio Astronomy Lab<br>
University of California, Berkeley<br>
151 LeConte Hall<br>
Berkeley, CA, 94720<br>
Work: (510) 642-7801<br>
Cell: (949) 677-1905<br>
Fax: (510) 643-5204<br>
Email: <a href="mailto:craum@berkeley.edu">craum@berkeley.edu</a><br>
Alt Email: <a href="mailto:crraum@gmail.com">crraum@gmail.com</a><br>
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<div class="gmail_quote">On Fri, Nov 6, 2015 at 10:42 AM, Vito Logiudice <span dir="ltr">
<<a href="mailto:vito.logiudice@uwaterloo.ca" target="_blank">vito.logiudice@uwaterloo.ca</a>></span> wrote:<br>
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<div>Dear Colleagues,</div>
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<div>I would appreciate hearing from anyone whom might be able to share some insights on how to reliably scribe & break sapphire substrates. We’re attempting to help out a couple of research groups here with such a requirement. </div>
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<div>We’ve had success with our water-cooled dicing saw but it appears this approach leads to unacceptable materials issues. We thus find ourselves having to resort to some sort of precision (& repeatable) scribe and break technique/setup which will result
in consistently smooth sidewalls.</div>
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<div>Thank you for any insights on procedures you may be using or equipment vendors you have worked with whom might be able to help.</div>
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<div>Best regards,</div>
<div>Vito </div>
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<div><font color="#000000"><font style="font-size:14px" face="Calibri"><font face="Calibri,sans-serif">--</font></font></font></div>
<div><font color="#000000"><font style="font-size:14px" face="Calibri"><font face="Calibri,sans-serif">Vito Logiudice </font>P.<font face="Calibri,sans-serif">Eng.</font></font></font></div>
<div><font color="#000000"><font face="Calibri"><font style="font-size:14px" face="Calibri,sans-serif">Director of Operations, Quantum NanoFab</font></font></font></div>
<div><font color="#000000"><font face="Calibri"><font style="font-size:14px" face="Calibri,sans-serif">University of Waterloo</font></font></font></div>
<div><font color="#000000"><font face="Calibri"><font style="font-size:14px" face="Calibri,sans-serif">Lazaridis QNC 1207</font></font></font></div>
<div><font color="#000000"><font face="Calibri"><font style="font-size:14px" face="Calibri,sans-serif">200 University Avenue West</font></font></font></div>
<div><font color="#000000"><font face="Calibri"><font style="font-size:14px" face="Calibri,sans-serif">Waterloo, ON Canada N2L 3G1</font></font></font></div>
<div><font color="#000000"><font face="Calibri"><font style="font-size:14px" face="Calibri,sans-serif">Tel.:
<a href="tel:%28519%29%20888-4567%20%C2%A0ext.%2038703" value="+15198884567" target="_blank">
(519) 888-4567 ext. 38703</a></font></font></font></div>
<div><span style="font-size:14px">Email: <a href="mailto:vito.logiudice@uwaterloo.ca" target="_blank">vito.logiudice@uwaterloo.ca</a></span></div>
<div><span style="font-size:14px">Website: </span><a href="https://fab.qnc.uwaterloo.ca" target="_blank">https://fab.qnc.uwaterloo.ca</a></div>
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