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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#0563C1" vlink="#954F72"><div class=WordSection1><p class=MsoNormal>Hi All,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>We have recently had a request in our facility to reactively sputter AlScN, either from an AlSc target or from co-sputtering of Al and Sc in an Ar/N2 environment. However, scandium is not a material that we have previously dealt with. The various MSDS I’ve read suggest there is little concern over toxicity, but I am also concerned about chamber contamination and incompatibility with other materials. Has anyone had experience with this material in their vacuum systems? <o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Best Regards,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Matt<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>-- <br><b>Matthew T. Moneck, Ph.D.</b><br>Executive Manager, Carnegie Mellon Nanofabrication Facility<br>Electrical and Computer Engineering | Carnegie Mellon University<br>5000 Forbes Ave., Pittsburgh, PA 15213-3890<br>T: 412.268.5430<br>F: 412.268.3497<br><a href="http://www.ece.cmu.edu"><span style='color:blue'>www.ece.cmu.edu</span></a><br>nanofab.ece.cmu.edu<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>