<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=iso-8859-1">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma",sans-serif;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma",sans-serif;}
span.EmailStyle19
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle20
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:black;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:85.05pt 56.7pt 85.05pt 56.7pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
<div class="WordSection1">
<p class="MsoNormal"><span style="color:black">We have the soft litho lab outside the cleanroom. These device fabrication can be done outside the cleanroom. Yes these materials outgas if you are using it in RIE, evaporation chambers. Its better to have dedicated
system for softlitho. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">There are small desktop plasma chambers available.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black">-Shiva<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">Shivakumar Bhaskaran, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">https://searle-cleanroom.uchicago.edu/<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Leif Johansen<br>
<b>Sent:</b> Wednesday, November 25, 2015 2:58 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] How do you handle PDMS in a cleanroom environment?<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear Lab Network, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have a dilemma. Polydimethylsiloxane (PDMS) is a promising material for soft lithography, and a lot of our users have a strong wish to process this material in our lab – especially for making nanoimprint stamps . However, before being
cured, PDMS is basically a silicone oil, and all our front end engineers (plasma chambers, lithography etc. ) are really scared about this substance ending up in their equipment. Our back end engineers (especially the wire bonding engineer) is also strongly
opposed to the introduction of PDMS into the back end lab. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Are there any experience out there in the community on how to handle PDMS in a cleanroom environment?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best regards, <o:p></o:p></p>
<p class="MsoNormal">Leif<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="400" style="width:300.0pt;border-collapse:collapse">
<tbody>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Leif S. Johansen
<o:p></o:p></span></b></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#9B9B9B;mso-fareast-language:EN-GB">Head of Operations<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">DTU Danchip
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;border:none;border-bottom:solid #AEAEAE 1.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal" style="mso-line-height-alt:0pt"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="350" valign="top" style="width:262.5pt;padding:6.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Technical University of Denmark<o:p></o:p></span></b></p>
</td>
<td width="50" rowspan="7" valign="top" style="width:37.5pt;padding:6.0pt 0in 0in 0in">
<p class="MsoNormal" align="right" style="text-align:right"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black"><img width="36" height="53" id="Picture_x0020_1" src="cid:image001.gif@01D12771.79EB0C50" alt="http://www.dtu.dk/images/DTU_email_logo_01.gif"></span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Danchip
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Ørsteds Plads, Byg. 347
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">2800 Lyngby
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Direct +45 45255713
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Mobile +45 25348992<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB"><a href="mailto:lesjo@danchip.dtu.dk">lesjo@danchip.dtu.dk</a>
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB"><a href="http://www.danchip.dtu.dk/">www.danchip.dtu.dk/</a>
<o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><span lang="DA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="DA"><o:p> </o:p></span></p>
</div>
</body>
</html>