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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Hi Leif,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">We have PDMS in the ISO 7 area of our cleanroom. Obviously we have a strict regime for this. All work is carried out in a designated fume hood. Uncured PDMS is only permitted in that fume hood.
Users must wear an extra pair of gloves and often sleeve protectors when working with PDMS and remove them immediately after PDMS work.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">All PDMS equipment is clearly marked and all users, even the untrained PDMS users are made aware of the dangers PDMS represents and are told not to touch anything from the PDMS area.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">The responsible engineer is Mathilde you could contact her directly if you would like to have more information on the routines in the area.
<a href="mailto:mathilde.i.barriet@ntnu.no">mathilde.i.barriet@ntnu.no</a> .<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Kind regards<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Mark <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Mark Chiappa<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">NTNU NanoLab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Sem Sælandsvei 14<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">7491 Trondheim<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Mob: +47 918 97 617<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Leif Johansen<br>
<b>Sent:</b> 25. november 2015 09:58<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] How do you handle PDMS in a cleanroom environment?<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Dear Lab Network, <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">I have a dilemma. Polydimethylsiloxane (PDMS) is a promising material for soft lithography, and a lot of our users have a strong wish to process this material in our lab – especially for making nanoimprint stamps . However,
before being cured, PDMS is basically a silicone oil, and all our front end engineers (plasma chambers, lithography etc. ) are really scared about this substance ending up in their equipment. Our back end engineers (especially the wire bonding engineer) is
also strongly opposed to the introduction of PDMS into the back end lab. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Are there any experience out there in the community on how to handle PDMS in a cleanroom environment?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Best regards, <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Leif S. Johansen
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Technical University of Denmark<o:p></o:p></span></b></p>
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Byg. 347 <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">2800 Lyngby
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Direct +45 45255713
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><a href="mailto:lesjo@danchip.dtu.dk">lesjo@danchip.dtu.dk</a>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><a href="http://www.danchip.dtu.dk/">www.danchip.dtu.dk/</a>
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