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Hi Leif --<br>
<br>
At SNF, we do allow PDMS in the cleanroom, with certain
restrictions.<br>
<br>
1. It must be of the Sylgard 182 or 184 or similar variety, where
there no volatile organics (i.e., no RTV's.)<br>
2. Mixing and degassing are done outside of the cleanroom (we have
a Thinky mixer in a prep area outside the cleanroom). This is to
prevent uncured silicone oils from migrating everywhere -- as others
have noted, extremely careful handling is required, but not a skill
most of our students have acquired. If they spill the mixed PDMS,
it will self-cure within a day.<br>
3. Uncured PDMS is allowed only in the manual spin coat station
(the one that can be lined with foil, for quick cleanup) and on the
adjacent hot plates, when covered with foil.<br>
4. Cured PDMS is allowed only in certain tools -- generally, those
that run at low temperatures and are not used for front-end device
processing. <br>
<br>
We've been able to control it, for the most part, because up to now,
it's been a small population of researchers using this. But because
of increased interest, we are trying to create establish more
processes and create more work spaces outside the cleanroom, where
students can spin coat, UV or plasma treat, bond, etc.<br>
<br>
Mary<br>
<br>
__<br>
Mary X. Tang, Ph.D.<br>
Lab Manager<br>
Stanford Nanofabrication Facility<br>
Paul G. Allen Building<br>
Stanford, CA. 94305<br>
<a class="moz-txt-link-abbreviated" href="mailto:mtang@stanford.edu">mtang@stanford.edu</a><br>
(650)723-9980<br>
<a class="moz-txt-link-freetext" href="http://snf.stanford.edu">http://snf.stanford.edu</a><br>
<br>
<div class="moz-cite-prefix">On 11/25/2015 8:31 AM, Vito Logiudice
wrote:<br>
</div>
<blockquote
cite="mid:952ACE98-CBEB-491F-9095-0E5D9788376F@connect.uwaterloo.ca"
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<div>Hi Leif,</div>
<div><br>
</div>
<div>Based on some past experience with PDMS I agree with the
concerns expressed by your engineers. If PDMS is handled
carefully and conscientiously by your end users then possible
damage can be contained or at least limited should it come
into contact with any of your equipment. The problem many of
us face in an academic setting however is the vast diversity
of people whom use our facilities. A minority of these
individuals tend to be
inexperienced/disorganized/messy/self-absorbed and it is these
people whom will possibly wreak havoc should you allow them to
work with PDMS in your cleanroom. I recall slipping on a large
glob of uncured PDMS that had been dropped on the floor of the
cleanroom by one of these “challenging users" at another site.</div>
<div><br>
</div>
<div>Another concern may be the outgassing of silicone over time
and its possible effects on other people’s work. I’m not an
expert in this particular field but for instance, the use of
silicone caulking was strictly forbidden during the
construction of our cleanroom here. Hopefully Jack Paul of HDR
Architecture will be able to share some insights in this
regard (HDR designed our facility).</div>
<div><br>
</div>
<div>For what it’s worth we do not currently allow PDMS in the
cleanroom at all. Should a well-justified argument for
introducing it be made in the future, I would likely insist on
only allowing cured PDMS in the cleanroom and only in
well-defined, possibly isolated, areas. Uncured work would
only be permitted in a satellite (non-cleanroom) lab.</div>
<div><br>
</div>
<div>Best regards,</div>
<div>Vito</div>
<div>
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<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" style="font-size: 14px; "
face="Calibri"><font face="Calibri,sans-serif">--</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" style="font-size: 14px; "
face="Calibri"><font face="Calibri,sans-serif">Vito
Logiudice </font>P.<font face="Calibri,sans-serif">Eng.</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" face="Calibri"><font
style="font-size: 14px; " face="Calibri,sans-serif">Director
of Operations, Quantum NanoFab</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" face="Calibri"><font
style="font-size: 14px; " face="Calibri,sans-serif">University
of Waterloo</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" face="Calibri"><font
style="font-size: 14px; " face="Calibri,sans-serif">Lazaridis
QNC 1207</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" face="Calibri"><font
style="font-size: 14px; " face="Calibri,sans-serif">200
University Avenue West</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" face="Calibri"><font
style="font-size: 14px; " face="Calibri,sans-serif">Waterloo,
ON Canada N2L 3G1</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font
class="Apple-style-span" face="Calibri"><font
style="font-size: 14px; " face="Calibri,sans-serif">Tel.:
(519) 888-4567 ext. 38703</font></font></font></div>
<div><span style="font-size: 14px; ">Email: <a
moz-do-not-send="true"
href="mailto:vito.logiudice@uwaterloo.ca"><a class="moz-txt-link-abbreviated" href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a></a></span></div>
<div><span style="font-size: 14px; "><font
class="Apple-style-span" color="#000000"><font
class="Apple-style-span" face="Calibri"><font
face="Calibri,sans-serif">Website: </font></font></font></span><a
moz-do-not-send="true"
href="https://fab.qnc.uwaterloo.ca"><a class="moz-txt-link-freetext" href="https://fab.qnc.uwaterloo.ca">https://fab.qnc.uwaterloo.ca</a></a></div>
<div><br>
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<span style="font-weight:bold">From: </span><<a
moz-do-not-send="true"
href="mailto:labnetwork-bounces@mtl.mit.edu"><a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a></a>>
on behalf of Leif Johansen <<a moz-do-not-send="true"
href="mailto:lej@danchip.dtu.dk">lej@danchip.dtu.dk</a>><br>
<span style="font-weight:bold">Date: </span>Wednesday,
November 25, 2015 at 3:58 AM<br>
<span style="font-weight:bold">To: </span>"<a
moz-do-not-send="true" href="mailto:labnetwork@mtl.mit.edu"><a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a></a>"
<<a moz-do-not-send="true"
href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<span style="font-weight:bold">Subject: </span>[labnetwork]
How do you handle PDMS in a cleanroom environment?<br>
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<div><br>
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<p class="MsoNormal"><span lang="EN-US">Dear Lab Network,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">I have a dilemma.
Polydimethylsiloxane (PDMS) is a promising material
for soft lithography, and a lot of our users have a
strong wish to process this material in our lab –
especially for making nanoimprint stamps . However,
before being cured, PDMS is basically a silicone oil,
and all our front end engineers (plasma chambers,
lithography etc. ) are really scared about this
substance ending up in their equipment. Our back end
engineers (especially the wire bonding engineer) is
also strongly opposed to the introduction of PDMS into
the back end lab. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Are there any
experience out there in the community on how to handle
PDMS in a cleanroom environment?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Best regards, <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:
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