<div dir="ltr">Hi Rick, <div><br></div><div>Another good option to consider would be <a href="http://memsstar.com/products-services/mems/vapor-HF-hydrogen-fluoride-vapor-phase-etching/">memsstar</a>.</div><div><br></div><div>Cheers, </div><div><br></div><div> – Aaron</div></div><div class="gmail_extra"><br clear="all"><div><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div><u style="font-size:x-small">  </u><span style="font-size:x-small">                                           </span><br></div><div><span style="font-size:12.8000001907349px"><font size="1"><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Aaron Hryciw, PhD, PEng</span></p><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Fabrication Group Manager</span><br></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">University of Alberta - nanoFAB</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4 </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">    </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">                </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Ph: 780-940-7938</span></p><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca/" style="color:rgb(17,85,204)" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">  </span></font></span><font color="#000000"><br></font><br></div></div></div></div></div></div></div></div></div></div></div></div>
<br><div class="gmail_quote">On Fri, Dec 4, 2015 at 5:35 AM, Christophe Clément <span dir="ltr"><<a href="mailto:christophe.clement@polymtl.ca" target="_blank">christophe.clement@polymtl.ca</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
<div lang="FR-CA" link="#0563C1" vlink="#954F72"><div><p class="MsoNormal"><span lang="EN-CA" style="color:#1f497d">Hi Richard<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA" style="color:#1f497d">Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher. <u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA" style="color:#1f497d">Consult the tool at <a href="http://www.idonus.com/" target="_blank">http://www.idonus.com/</a><u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA" style="color:#1f497d">Best<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-CA" style="color:#1f497d">Christophe<u></u><u></u></span></p><p class="MsoNormal"><span style="color:#1f497d"><u></u> <u></u></span></p><p class="MsoNormal"><a name="1516d1a6eabfbc3e_OLE_LINK2"></a><a name="1516d1a6eabfbc3e_OLE_LINK1"><b><i><span style="font-size:12.0pt;font-family:"Arial",sans-serif;color:#1f497d">Christophe Clément</span></i></b></a><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:gray">Technicien laboratoire</span></b><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Laboratoire de microfabrication (LMF)</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca" target="_blank">www.gcmlab.ca</a></u></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Ecole Polytechnique de Montréal </span><a href="http://www.polymtl.ca/" target="_blank"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">www.polymtl.ca</span></a><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Département de génie physique </span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;color:#1f497d">*</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">2900 Boulevard Edouard Monpetit</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Pavillon JAB<br>Campus de l'Université de Montréal<br>Montréal (Québec) H3T 1J4</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray"><br></span><span style="font-size:10.0pt;font-family:Wingdings;color:#1f497d">8</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333"> </span><a href="mailto:christophe.clement@polymtl.ca" target="_blank"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:blue">christophe.clement@polymtl.ca</span></a><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;color:#1f497d">(</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray"><a href="tel:514%20340%204711" value="+15143404711" target="_blank">514 340 4711</a><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Fax : <a href="tel:514%20340%204711%C2%A0%23%202417" value="+15143404711" target="_blank">514 340 4711 # 2417</a> </span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1f497d"><u></u><u></u></span></p><p class="MsoNormal"><span style="color:#1f497d"><u></u> <u></u></span></p><p class="MsoNormal"><span style="color:#1f497d"><u></u> <u></u></span></p><div><div style="border:none;border-top:solid #e1e1e1 1.0pt;padding:3.0pt 0cm 0cm 0cm"><p class="MsoNormal"><b><span lang="FR">De :</span></b><span lang="FR"> Morrison, Richard H., Jr. [mailto:<a href="mailto:rmorrison@draper.com" target="_blank">rmorrison@draper.com</a>] <br><b>Envoyé :</b> 3 décembre 2015 13:21<br><b>À :</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br><b>Objet :</b> [labnetwork] HF vapor etch<u></u><u></u></span></p></div></div><div><div class="h5"><p class="MsoNormal"><u></u> <u></u></p><p class="MsoNormal"><span lang="EN-US">Hi Folks,<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US">I am  looking for a HF vapor release tool, I see that OAI and SPTS are the 2 manufactures out there, any recommendations or other suppliers?<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US"><br>thanks in advance<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US">Rick<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US">Draper <u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US">Principal  Member of the Technical Staff<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US">Group Leader Microfabrication Operations<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US">555 Technology Square<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US">Cambridge Ma, 02139-3563<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US"><a href="http://www.draper.com" target="_blank">www.draper.com</a><u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US"><a href="mailto:rmorrison@draper.com" target="_blank">rmorrison@draper.com</a><u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US">W <a href="tel:617-258-3420" value="+16172583420" target="_blank">617-258-3420</a><u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US">C <a href="tel:508-930-3461" value="+15089303461" target="_blank">508-930-3461</a><u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US"><u></u> <u></u></span></p><div class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><hr size="3" width="100%" align="center"></span></div><p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. <u></u><u></u></span></p><div class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><hr size="3" width="100%" align="center"></span></div></div></div></div></div><br>_______________________________________________<br>
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