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<p class="MsoNormal"><span style="color:#1F497D">Hi Rick and Christophe,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Sorry that I can’t give an advice about a manufacturer but I have a question around the installation of such a system. At ANU we do have a system (not sure of the brand but it looks like the Idonus system) and
our local H&S office does not allow the use of it in a fume hood unless the exhaust line is adequately wet scrubbed. Hence I wonder if you can share the installation information and whether the fume hood is wet-scrubbed before releasing the vapours to outside
atmosphere. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Also is it recommended to put a sensor on the scrubber outlet to monitor the fumes content?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Thanks, <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">*********************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Email: <a href="mailto:fouad.karouta@anu.edu.au">
<span style="color:blue">fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://anff-act.anu.edu.au/"><span style="color:blue">http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Christophe Clément<br>
<b>Sent:</b> Friday, December 4, 2015 11:36 PM<br>
<b>To:</b> Morrison, Richard H., Jr.; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] HF vapor etch<o:p></o:p></span></p>
</div>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D;mso-fareast-language:EN-US">Hi Richard<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D;mso-fareast-language:EN-US">Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D;mso-fareast-language:EN-US">Consult the tool at
<a href="http://www.idonus.com/">http://www.idonus.com/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D;mso-fareast-language:EN-US">Best<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D;mso-fareast-language:EN-US">Christophe<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><a name="OLE_LINK1"></a><a name="OLE_LINK2"></a><b><i><span lang="FR-CA" style="font-size:12.0pt;font-family:"Arial","sans-serif";color:#1F497D">Christophe Clément</span></i></b><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="FR-CA" style="font-size:10.0pt;font-family:"Arial","sans-serif";color:gray">Technicien laboratoire</span></b><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">Laboratoire de microfabrication (LMF)</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">Groupe des Couches Minces (GCM)
<u><a href="http://www.gcmlab.ca">www.gcmlab.ca</a></u></span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">Ecole Polytechnique de Montréal
</span><span lang="FR-CA"><a href="http://www.polymtl.ca/"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">www.polymtl.ca</span></a></span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">Département de génie physique
</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">*</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#333333">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">2900 Boulevard Edouard Monpetit</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray"><br>
</span><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">8</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#333333">
</span><span lang="FR-CA"><a href="mailto:christophe.clement@polymtl.ca"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:blue">christophe.clement@polymtl.ca</span></a></span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">(</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#333333">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">514 340 4711<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";color:gray">Fax : 514 340 4711 # 2417
</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="FR">De :</span></b><span lang="FR"> Morrison, Richard H., Jr. [<a href="mailto:rmorrison@draper.com">mailto:rmorrison@draper.com</a>]
<br>
<b>Envoyé :</b> 3 décembre 2015 13:21<br>
<b>À :</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Objet :</b> [labnetwork] HF vapor etch<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="FR-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Hi Folks,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">I am looking for a HF vapor release tool, I see that OAI and SPTS are the 2 manufactures out there, any recommendations or other suppliers?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><br>
thanks in advance<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Draper <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
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