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<p class="MsoNormal"><span style="color:#1F497D">Hi Everyone,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">OAI (Optical Associates, Incorporated) is the distributor for Idonus products in North America. Please let me know if you need anything.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">---Paul<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Paul Maciel<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Optical Associates, Incorporated<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Sales and Technical Support</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">(408) 514-6121</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"><a href="mailto:pmaciel@oainet.com"><span style="color:blue">pmaciel@oainet.com</span></a></span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"><a href="http://www.oainet.com/"><span style="color:blue">http://www.oainet.com</span></a></span><o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Christophe Clément<br>
<b>Sent:</b> Friday, December 04, 2015 7:36 AM<br>
<b>To:</b> Morrison, Richard H., Jr. <rmorrison@draper.com>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] HF vapor etch<o:p></o:p></p>
</div>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Hi Richard<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Consult the tool at
<a href="http://www.idonus.com/">http://www.idonus.com/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Best<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Christophe<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><a name="OLE_LINK1"></a><a name="OLE_LINK2"></a><b><i><span lang="FR-CA" style="font-size:12.0pt;font-family:"Arial",sans-serif;color:#1F497D">Christophe Clément</span></i></b><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="FR-CA" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:gray">Technicien laboratoire</span></b><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Laboratoire de microfabrication (LMF)</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Groupe des Couches Minces (GCM)
<u><a href="http://www.gcmlab.ca">www.gcmlab.ca</a></u></span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Ecole Polytechnique de Montréal
</span><span lang="FR-CA"><a href="http://www.polymtl.ca/"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">www.polymtl.ca</span></a></span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Département de génie physique
</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">*</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">2900 Boulevard Edouard Monpetit</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray"><br>
</span><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">8</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333">
</span><span lang="FR-CA"><a href="mailto:christophe.clement@polymtl.ca"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:blue">christophe.clement@polymtl.ca</span></a></span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">(</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">514 340 4711<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">Fax : 514 340 4711 # 2417
</span><span lang="FR-CA" style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<div>
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<p class="MsoNormal"><b><span lang="FR">De :</span></b><span lang="FR"> Morrison, Richard H., Jr. [<a href="mailto:rmorrison@draper.com">mailto:rmorrison@draper.com</a>]
<br>
<b>Envoyé :</b> 3 décembre 2015 13:21<br>
<b>À :</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Objet :</b> [labnetwork] HF vapor etch<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="FR-CA"><o:p> </o:p></span></p>
<p class="MsoNormal">Hi Folks,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am looking for a HF vapor release tool, I see that OAI and SPTS are the 2 manufactures out there, any recommendations or other suppliers?<o:p></o:p></p>
<p class="MsoNormal"><br>
thanks in advance<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Draper <o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Group Leader Microfabrication Operations<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge Ma, 02139-3563<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></p>
<p class="MsoNormal"><a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></p>
<p class="MsoNormal">W 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">C 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient
of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
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