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<p class="MsoNormal"><span style="color:#1F497D">Hi Rick, <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">FYI, only on my own experience, about 10yrs ago, I used Primaxx (now SPTS) 1<sup>st</sup> cluster VHF system, and as well as their single wafer tool. The process results meet our need.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">And Fouad, <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I think it is good to have sensor or detector to monitor contents, just to give you peace of mind. As I recalled, at that time, it is a pretty new technology, while We worked together with the manufacturer
for process development and hardware improvement. We did detect HF residual content around atmosphere on the single wafer etch system once open the chamber door.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Best -JL<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Fouad Karouta<br>
<b>Sent:</b> December-04-15 11:28 AM<br>
<b>To:</b> Christophe Clément; Morrison, Richard H., Jr.; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] HF vapor etch<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Hi Rick and Christophe,</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D"> </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Sorry that I can’t give an advice about a manufacturer but I have a question around the installation of such a system. At ANU we do have a system (not sure of the brand but it looks like the Idonus
system) and our local H&S office does not allow the use of it in a fume hood unless the exhaust line is adequately wet scrubbed. Hence I wonder if you can share the installation information and whether the fume hood is wet-scrubbed before releasing the vapours
to outside atmosphere. </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Also is it recommended to put a sensor on the scrubber outlet to monitor the fumes content?</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D"> </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Thanks, </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Fouad Karouta</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D"> </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">*********************************</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Manager ANFF ACT Node</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Australian National Fabrication Facility</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Research School of Physics and Engineering</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">L. Huxley Building (#56), Mills Road, Room 4.02</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Australian National University</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">ACT 0200, Canberra, Australia</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Tel: + 61 2 6125 7174</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Mob: + 61 451 046 412</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D">Email: <a href="mailto:fouad.karouta@anu.edu.au">
<span style="color:blue">fouad.karouta@anu.edu.au</span></a></span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D"><a href="http://anff-act.anu.edu.au/"><span style="color:blue">http://anff-act.anu.edu.au/</span></a></span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="color:#1F497D"> </span><span lang="EN-AU"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Christophe Clément<br>
<b>Sent:</b> Friday, December 4, 2015 11:36 PM<br>
<b>To:</b> Morrison, Richard H., Jr.; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] HF vapor etch</span><span lang="EN-AU"><o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-AU"> <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Hi Richard</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.
</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Consult the tool at
<a href="http://www.idonus.com/">http://www.idonus.com/</a></span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Best</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Christophe</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"> </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><a name="OLE_LINK1"></a><a name="OLE_LINK2"></a><b><i><span lang="FR-CA" style="font-size:12.0pt;font-family:"Arial","sans-serif";color:#1F497D">Christophe Clément</span></i></b><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="FR-CA" style="font-size:10.0pt;font-family:
"Arial","sans-serif";color:gray">Technicien laboratoire</span></b><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Laboratoire de microfabrication (LMF)</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Groupe des Couches Minces (GCM)
<u><a href="http://www.gcmlab.ca">www.gcmlab.ca</a></u></span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Ecole Polytechnique de Montréal
</span><span lang="FR-CA"><a href="http://www.polymtl.ca/"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">www.polymtl.ca</span></a></span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Département de génie physique
</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D">*</span><span lang="FR-CA" style="font-size:8.0pt;font-family:
"Arial","sans-serif";color:#333333">
</span><span lang="FR-CA" style="font-size:
8.0pt;font-family:"Arial","sans-serif";color:gray">2900 Boulevard Edouard Monpetit</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray"><br>
</span><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D">8</span><span lang="FR-CA" style="font-size:8.0pt;font-family:
"Arial","sans-serif";color:#333333">
</span><span lang="FR-CA"><a href="mailto:christophe.clement@polymtl.ca"><span style="font-size:8.0pt;
font-family:"Arial","sans-serif";color:blue">christophe.clement@polymtl.ca</span></a></span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D">(</span><span lang="FR-CA" style="font-size:8.0pt;font-family:
"Arial","sans-serif";color:#333333">
</span><span lang="FR-CA" style="font-size:
8.0pt;font-family:"Arial","sans-serif";color:gray">514 340 4711</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Fax : 514 340 4711 # 2417
</span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"> </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="color:#1F497D"> </span><span lang="EN-AU"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="FR">De :</span></b><span lang="FR"> Morrison, Richard H., Jr. [<a href="mailto:rmorrison@draper.com">mailto:rmorrison@draper.com</a>]
<br>
<b>Envoyé :</b> 3 décembre 2015 13:21<br>
<b>À :</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Objet :</b> [labnetwork] HF vapor etch</span><span lang="EN-AU"><o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="FR-CA"> </span><span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">Hi Folks,<span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"> <span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">I am looking for a HF vapor release tool, I see that OAI and SPTS are the 2 manufactures out there, any recommendations or other suppliers?<span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"><br>
thanks in advance<span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"> <span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">Rick<span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"> <span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal"> <span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">Draper <span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">Principal Member of the Technical Staff<span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">Group Leader Microfabrication Operations<span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">555 Technology Square<span lang="EN-AU"><o:p></o:p></span></p>
<p class="MsoNormal">Cambridge Ma, 02139-3563<span lang="EN-AU"><o:p></o:p></span></p>
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