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<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Just a side comment on this thread for we have a Suss MA6/BA6.
<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We used to run in constant power mode, but our clients always had to adjust their exposure durations as the bulb degraded. We changed to constant intensity mode
and results are much more consistent all the time. When our controller starts to howl when it can’t deliver the intensity needed or we reach our time limit then we change the lamp.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Just my $0.02.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Julia Aebersold, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">502-852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">http://louisville.edu/micronano/</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Shivakumar Bhaskaran<br>
<b>Sent:</b> Thursday, January 14, 2016 12:43 PM<br>
<b>To:</b> Rob Vandusen <rvanduse@doe.carleton.ca>; 'Mario Portillo' <hbtusainc@yahoo.com>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] EVG 620 Mask Aligner issue<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">We run at constant power mode.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">-Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">-Shiva<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Shivakumar Bhaskaran, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black"><a href="https://searle-cleanroom.uchicago.edu/">https://searle-cleanroom.uchicago.edu/</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Rob Vandusen [<a href="mailto:rvanduse@doe.carleton.ca">mailto:rvanduse@doe.carleton.ca</a>]
<br>
<b>Sent:</b> Thursday, January 14, 2016 11:31 AM<br>
<b>To:</b> Shivakumar Bhaskaran <<a href="mailto:sbhas@uchicago.edu">sbhas@uchicago.edu</a>>; 'Mario Portillo' <<a href="mailto:hbtusainc@yahoo.com">hbtusainc@yahoo.com</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> RE: [labnetwork] EVG 620 Mask Aligner issue<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Not sure if you are running your system in constant power or constant intensity mode, but if it is in constant intensity it may be limiting the
power.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Rob.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:10.0pt;font-family:"Arial Black",sans-serif;color:#1F497D">Robert Vandusen<br>
Technical Officer, Microfabrication Lab<br>
Electronics Department<br>
Carleton University<br>
room: 4184 Mackenzie Building<br>
613-520-2600 ext 5761<br>
<a href="mailto:rvanduse@doe.carleton.ca">rvanduse@doe.carleton.ca</a> </span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Arial Black",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Shivakumar Bhaskaran<br>
<b>Sent:</b> January-14-16 10:21 AM<br>
<b>To:</b> Mario Portillo <<a href="mailto:hbtusainc@yahoo.com">hbtusainc@yahoo.com</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] EVG 620 Mask Aligner issue<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">The controller has interlock, the lamp will turn ON only if the cooling and air is ON, may be I can bypass the interlock will check with EVG regarding this.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">-Shiva<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Shivakumar Bhaskaran, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:black"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__searle-2Dcleanroom.uchicago.edu_&d=AwMGaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=maSU4kYVUB_arEtqsFvKf4Q9ZhZXD0JldeVKK69LgOA&s=iCXJtOshsWYbnf0B4CIWYAWIf1zmaOojU-eCzpoty7Q&e="><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> https://searle-cleanroom.uchicago.edu/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Mario Portillo [<a href="mailto:hbtusainc@yahoo.com">mailto:hbtusainc@yahoo.com</a>]
<br>
<b>Sent:</b> Thursday, January 14, 2016 6:10 AM<br>
<b>To:</b> Shivakumar Bhaskaran <<a href="mailto:sbhas@uchicago.edu">sbhas@uchicago.edu</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] EVG 620 Mask Aligner issue<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Shiva, a few suggestions ; make sure lamp is installed correctly, anode side down, anode/ cathode connections nice n tight at the light source n power supply, over cooling ??? Turn cooling off n turn lamp on, for a 500W lamp the normal
operating voltage should be around average of 60vdc and 8.5 amps, last but not least .. A bad batch of lamps ??? I have seen this a few times thru the years...<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt">I hope this helps..... Regards <br>
<br>
<br>
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__yho.com_footer0&d=AwMGaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=maSU4kYVUB_arEtqsFvKf4Q9ZhZXD0JldeVKK69LgOA&s=5adl3RBTEDJZLJN_p0uM6hyfogPaNjNRa9XTkbutsPE&e=">Sent
from Yahoo Mail for iPhone</a><o:p></o:p></p>
<p style="margin-top:0in"><span style="font-size:11.5pt;color:#715FFA">On Wednesday, January 13, 2016, 4:52 PM, Shivakumar Bhaskaran <<a href="mailto:sbhas@uchicago.edu">sbhas@uchicago.edu</a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
The lamp in the mask aligner is not reaching 500W its stays at 150W. I did send the power supply to EVG to test it in their unit and it works fine. I changed the bulbs and still the same issue. Does anyone had faced similar issue in your Mask Aligner.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
-Thanks<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
-Shiva<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<span style="font-size:10.0pt">Shivakumar Bhaskaran, Ph.D.</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<span style="font-size:10.0pt">Searle CleanRoom Manager</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<span style="font-size:10.0pt">The University of Chicago</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<span style="font-size:10.0pt">5735 S.Ellis, Room 032</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<span style="font-size:10.0pt">Chicago-60637</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<span style="font-size:10.0pt">Ph:<a href="tel:773-795-2297">773-795-2297</a></span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<span style="font-size:10.0pt"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__searle-2Dcleanroom.uchicago.edu_&d=AwMGaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=maSU4kYVUB_arEtqsFvKf4Q9ZhZXD0JldeVKK69LgOA&s=iCXJtOshsWYbnf0B4CIWYAWIf1zmaOojU-eCzpoty7Q&e=" target="_blank"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> https://searle-cleanroom.uchicago.edu/</a></span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;background:white">
<o:p></o:p></p>
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<div id="msgSandbox_AEt3w0MAABJCVpbxQga6qA5CEXI_2">
<p class="MsoNormal" style="background:white">_______________________________________________<br>
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