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<p class="MsoNormal"><span style="color:#1F497D">Hi Bruce,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">I need a bit more information in order to help?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Is the ESC the “older” (Blue) SEMCO type which is driven by the DR4 Electrogrip PSU? IF so then I guess you have connected an RS232 cable with some terminal software and are sending the grip command
(CTRL + G) to clamp the wafer. Under normal operation (wafer load / unload) the DR4 will grip when the grip remote voltage input signal changes. On older systems this signal is output from the STS VAC module, is your system an older STS module type?
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">If your ESC is the “new” TDESC (Beige) type then It will use a different power supply (FUG maybe) and probably be driven by the PLC..<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">If you let me know the type of ESC is fitted (SEMCO or TDESC), power supply connected (FUG or DR4) and the control system type (PLC or STS modules) then we can definitely help you with the drawings
and advice.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Roy Cork<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">DTU Danchip<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Denmark<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Bruce Tolleson<br>
<b>Sent:</b> 20. januar 2016 23:03<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] STS ASE Electrostatic Chuck<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">Dear Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Does anyone know the electrostatic chuck or have prints for the clamping circuit for an STS ASE deep RIE system?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">We can manually tell the clamp to come on but it won’t come on running a recipe. We suspect it may be a programming issue but we lack the info to correct it.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Can anyone help?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">(585) 478-3836<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:navy"><img width="90" height="60" id="Picture_x0020_1" src="cid:image001.jpg@01D15424.137C3CC0" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span lang="EN-US" style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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