<div dir="ltr">Adam Neal,<div><br></div><div>The University of California Marvell NanoFabrication operates five RTP systems all manufactured by AllWin21. Specifically four AccuThermo AW610 RTP and one AccuThermo AW810 RTP. Previously the lab ran two Heatpulse 210's. <div><br></div><div>The Allwin21 tools have performed virtually trouble free. We receive excellent support for our questions. Sourcing replacement parts such as quartzware and lamps is reliable. </div><div><br></div><div>We operate the 610's in two modes, with thermocouple (TC) and with IR pyrometry depending on the process temperature requirements. The 810 is a MOS tool and run only in the IR pyrometer mode. </div><div><br></div><div>Our tools are shared by multiple users. We keep dedicated chambers for non-MOS processes such as III-V annealing and other unusual materials. For those users with a harsh processing and who require a thermocouple ("instrumented wafers") we have them purchase their own TC. Changing between IR pyrometry and an instrumented wafer (TC) is relatively simple. Low temperature process are better controlled via a TC. </div><div><br></div><div>Our experience in maintaining accurate IR pyrometery for an RTP requires payng attention to the condition of the IR window of the isolation tube (chamber). IR wavelengths pass through a thin fused silica window fabricated into the underside of the chamber. The IR sensor, held at a constant temperature, gets its input via this window. The window is made of OH-free fused silica, a specific grade of silica that reduces the IR absorption peak found in common, flame-fusion silica. Even the the window attenuates the IR signal; its thicknes is therefore important. Each cleaning of a chambers, even in mild HF, erodes the window reducing its thickness. Also thin film coatings will attenuate the IR signal. Following a chamber clean it is good practice to run a calibration. We use mild 49% HF, 1 part to 10 parts DI to clean the IR window. A cotton swap speeds up the process. <br></div><div><br></div><div>I have no experience with the Jipelec and cannot offer any guidance on comparing vendors or tool performance.<br></div></div><div><br></div><div>Regards,</div><div>Bob Hamilton</div><div><br></div></div><div class="gmail_extra"><br clear="all"><div><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div><div><div><div><div><br>Robert Hamilton<br></div>University of CA, Berkeley<br>Marvell NanoLab Equipment Manager<br></div>Rm 520 Sutardja Dai Hall, MC 1754<br></div>Berkeley, CA 94720<br></div>Phone 510-809-8618 (desk - preferred)<br></div>Mobile 510-325-7557 (my personal mobile)<br></div>E-mail preferred: <a href="mailto:bob@eecs.berkeley.edu" target="_blank">bob@eecs.berkeley.edu</a><br><a href="http://nanolab.berkeley.edu/" target="_blank">http://nanolab.berkeley.edu/</a></div><div dir="ltr"><br></div><div dir="ltr"><br><div><div><div><div><div><div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div>
<br><div class="gmail_quote">On Wed, Jan 20, 2016 at 3:04 PM, NEAL, ADAM T CTR USAF AFMC AFRL/RXAN <span dir="ltr"><<a href="mailto:adam.neal.2.ctr@us.af.mil" target="_blank">adam.neal.2.ctr@us.af.mil</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
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<p>Labnetwork list members,</p>
<p> </p>
<p>The research group of which I am a part at the Air Force Research Lab is considering the purchase of an RTP system. So far, we are considering the Jipelec Jetfirst RTP and the Allwin21 AW610 which have been recommended to us by some colleagues. I've received
very helpful information from <span>Dan Hosler at Purdue, particularly on the Jipelec, but thought I'd solicit input from this mailing list as well.</span></p>
<p><span></span> </p>
<p><span>I'd sincerely appreciate information from list members on their experience using/maintaining these RTP. If you own a system from either of these companies, are you satisfied and would you recommend it? How does the Allwin21 RTP compare
to the Heatpulse RTP on which it is based?</span></p>
<p><span></span> </p>
<p><span>Thanks very much for the assistance. I've followed this list after attending UGIM as a student several years ago. There's clearly a lot of expertise here so I'm very happy to have been introduced to this list.</span></p>
<p><span></span> </p>
<p>Adam T. Neal, PhD<br>
Postdoctoral Research Engineer<br>
Air Force Research Lab</p>
<p>Materials and Manufacturing Directorate</p>
<p>Universal Technology Corporation<br>
Wright-Patterson AFB, OH, 45433</p>
<p><a href="mailto:adam.neal.2.ctr@us.af.mil" target="_blank">adam.neal.2.ctr@us.af.mil</a></p>
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