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<p class="MsoNormal">HI,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am working on a project that requires photolith at 100nm, I have access to an E-Beam but I was wondering if anybody has DUV stepper for 150mm wafers working at 100nm line space that Draper could use.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks in advance.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Draper <o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge Ma, 02139-3563<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">www.draper.com<o:p></o:p></p>
<p class="MsoNormal">rmorrison@draper.com<o:p></o:p></p>
<p class="MsoNormal">W 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">C 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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