<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=iso-8859-1">
<meta name="Generator" content="Microsoft Word 14 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:SimSun;
panose-1:2 1 6 0 3 1 1 1 1 1;}
@font-face
{font-family:SimSun;
panose-1:2 1 6 0 3 1 1 1 1 1;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:"\@SimSun";
panose-1:2 1 6 0 3 1 1 1 1 1;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0cm;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.EmailStyle17
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="DA" link="#0563C1" vlink="#954F72">
<div class="WordSection1">
<p class="MsoNormal"><span style="color:#1F497D">Hello Rick, <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">At DTU Danchip we have a Canon FPA-3000 EX4 DUV stepper with a KrF excimer laser at 248 nm wavelength which is set up to handle 150 mm wafers. The nominal resolution limit specified by Canon is 250
nm, but we have obtained 160 nm for straight lines and spaces. The exact resolution limit is very dependent on the actual pattern and, of course, also on the resist thickness.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Best regards, <o:p>
</o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="400" style="width:300.0pt;border-collapse:collapse">
<tbody>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Leif S. Johansen
</span></b><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></b></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#9B9B9B;mso-fareast-language:EN-GB">Head of Operations</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#9B9B9B;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">DTU Danchip
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;border:none;border-bottom:solid #AEAEAE 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal" style="mso-line-height-alt:0pt"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="350" valign="top" style="width:262.5pt;padding:6.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Technical University of Denmark</span></b><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></b></p>
</td>
<td width="50" rowspan="7" valign="top" style="width:37.5pt;padding:6.0pt 0cm 0cm 0cm">
<p class="MsoNormal" align="right" style="text-align:right"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><img width="36" height="53" id="Picture_x0020_1" src="cid:image001.gif@01D159A9.7C1C0050" alt="http://www.dtu.dk/images/DTU_email_logo_01.gif"></span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Danchip
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Ørsteds Plads, Byg. 347
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">2800 Lyngby
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Direct +45 45255713
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Mobile +45 25348992</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><a href="mailto:lesjo@danchip.dtu.dk"><span style="color:blue">lesjo@danchip.dtu.dk</span></a>
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><a href="http://www.danchip.dtu.dk/"><span style="color:blue">www.danchip.dtu.dk/</span></a>
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Morrison, Richard H., Jr.<br>
<b>Sent:</b> 27. januar 2016 14:39<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] need help with photolithography<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">HI,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">I am working on a project that requires photolith at 100nm, I have access to an E-Beam but I was wondering if anybody has DUV stepper for 150mm wafers working at 100nm line space that Draper could use.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thanks in advance.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Draper <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">W 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">C 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<div class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman","serif"">
<hr size="2" width="100%" align="center">
</span></div>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman","serif"">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended
recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
<o:p></o:p></span></p>
<div class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman","serif"">
<hr size="2" width="100%" align="center">
</span></div>
</div>
</body>
</html>