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<p class="MsoNormal">One of our user wants to sputter LiCoO2 and Li3PO4 for fabricating the battery device. Have anyone used this materials in your sputtering system. Will this material have contamination issue with other processes (mostly metals). Do I need
to follow any safety procedures before/after sputtering.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks<o:p></o:p></p>
<p class="MsoNormal">-Shiva<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Shivakumar Bhaskaran, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">https://searle-cleanroom.uchicago.edu/<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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