<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 14 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:SimSun;
panose-1:2 1 6 0 3 1 1 1 1 1;}
@font-face
{font-family:SimSun;
panose-1:2 1 6 0 3 1 1 1 1 1;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:"\@SimSun";
panose-1:2 1 6 0 3 1 1 1 1 1;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0cm;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.EmailStyle17
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:3.0cm 2.0cm 3.0cm 2.0cm;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="DA" link="blue" vlink="purple">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hello Vito,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">We have plasma ashers from TePla. We have interlocked the “Enter” and “Run” buttons.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">We have a YES-310TA identical to yours. We have interlocked the valve on the HMDS line. If you are interested, we can send a sketch of the solution.
A few people have forgotten to log in and only discovered their mistake when their patterns fell off the wafer during development. A bit unfortunate, but a good way to teach people that they should log on to equipment.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="400" style="width:300.0pt;border-collapse:collapse">
<tbody>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Leif S. Johansen
</span></b><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></b></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#9B9B9B;mso-fareast-language:EN-GB">Head of Operations</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#9B9B9B;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">DTU Danchip
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;border:none;border-bottom:solid #AEAEAE 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal" style="mso-line-height-alt:0pt"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td width="350" valign="top" style="width:262.5pt;padding:6.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Technical University of Denmark</span></b><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></b></p>
</td>
<td width="50" rowspan="7" valign="top" style="width:37.5pt;padding:6.0pt 0cm 0cm 0cm">
<p class="MsoNormal" align="right" style="text-align:right"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><img width="36" height="53" id="Picture_x0020_1" src="cid:image001.gif@01D163FB.AD35F270" alt="http://www.dtu.dk/images/DTU_email_logo_01.gif"></span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Danchip
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Ørsteds Plads, Byg. 347
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">2800 Lyngby
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Direct +45 45255713
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB">Mobile +45 25348992</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><a href="mailto:lesjo@danchip.dtu.dk">lesjo@danchip.dtu.dk</a>
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><a href="http://www.danchip.dtu.dk/">www.danchip.dtu.dk/</a>
</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Vito Logiudice<br>
<b>Sent:</b> 8. februar 2016 22:54<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Suggestions for interlocking O2 plasma & HMDS systems<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Dear Colleagues,<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">I’d greatly appreciate hearing from those of you whom have devised ways of safely interlocking a couple of systems we’re currently working on. These include the
following:<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Oxygen plasma strip system:
<a href="http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf">http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf</a><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">HMDS prime oven:
<a href="http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf">http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf</a><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Thank you very much for any insights.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Best regards,<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black">Vito<o:p></o:p></span></p>
</div>
<div>
<div id="MAC_OUTLOOK_SIGNATURE">
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">--</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Vito Logiudice P.Eng.</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Director of Operations, Quantum NanoFab</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">University of Waterloo</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Lazaridis QNC 1207</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">200 University Avenue West</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Waterloo, ON Canada N2L 3G1</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Tel.: (519) 888-4567 ext. 38703</span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Email: <a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a></span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri","sans-serif";color:black">Website: </span><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><a href="https://fab.qnc.uwaterloo.ca">https://fab.qnc.uwaterloo.ca</a><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
</div>
</div>
</div>
</div>
</body>
</html>