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<div>Hi Leif (and others),</div>
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<div>Thank you and everyone else for taking the time to share your very varied and helpful suggestions. It’s greatly appreciated.</div>
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<div>Best regards,</div>
<div>Vito</div>
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<span style="font-weight:bold">From: </span>Leif Johansen <<a href="mailto:lej@danchip.dtu.dk">lej@danchip.dtu.dk</a>><br>
<span style="font-weight:bold">Date: </span>Wednesday, February 10, 2016 at 6:07 AM<br>
<span style="font-weight:bold">To: </span>Vito Logiudice <<a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a>>, "<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>" <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<span style="font-weight:bold">Subject: </span>RE: Suggestions for interlocking O2 plasma & HMDS systems<br>
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<p class="MsoNormal"><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);">Hello Vito,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);">We have plasma ashers from TePla. We have interlocked the “Enter” and “Run” buttons.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);">We have a YES-310TA identical to yours. We have interlocked the valve on the HMDS line. If you are interested, we can send a sketch of
the solution. A few people have forgotten to log in and only discovered their mistake when their patterns fell off the wafer during development. A bit unfortunate, but a good way to teach people that they should log on to equipment.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);">Leif<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;">Leif S. Johansen
</span></b><b><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><o:p></o:p></span></b></p>
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<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: rgb(155, 155, 155);">Head of Operations</span><span style="font-size: 8pt; font-family: Arial, sans-serif; color: rgb(155, 155, 155);"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;">DTU Danchip
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<p class="MsoNormal"><b><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;">Technical University of Denmark</span></b><b><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><o:p></o:p></span></b></p>
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<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;">Ørsteds Plads, Byg. 347
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<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;">2800 Lyngby
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<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;">Direct +45 45255713
</span><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;">Mobile +45 25348992</span><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><a href="mailto:lesjo@danchip.dtu.dk">lesjo@danchip.dtu.dk</a></span><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><a href="http://www.danchip.dtu.dk/">www.danchip.dtu.dk/</a></span><span style="font-size: 8pt; font-family: Arial, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size: 10pt; font-family: Tahoma, sans-serif;">From:</span></b><span lang="EN-US" style="font-size: 10pt; font-family: Tahoma, sans-serif;">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Vito Logiudice<br>
<b>Sent:</b> 8. februar 2016 22:54<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Suggestions for interlocking O2 plasma & HMDS systems<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;">Dear Colleagues,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;">I’d greatly appreciate hearing from those of you whom have devised ways of safely interlocking a couple of systems we’re currently working on. These include
the following:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;">Oxygen plasma strip system:
<a href="http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf">http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;">HMDS prime oven:
<a href="http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf">http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;">Thank you very much for any insights.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;">Best regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;">Vito<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">--</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">Vito Logiudice P.Eng.</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">Director of Operations, Quantum NanoFab</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">University of Waterloo</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">Lazaridis QNC 1207</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">200 University Avenue West</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">Waterloo, ON Canada N2L 3G1</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">Tel.: (519) 888-4567 ext. 38703</span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">Email: <a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a></span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 10.5pt; font-family: Calibri, sans-serif; color: black;">Website: </span><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><a href="https://fab.qnc.uwaterloo.ca">https://fab.qnc.uwaterloo.ca</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size: 11.5pt; font-family: Calibri, sans-serif; color: black;"><o:p> </o:p></span></p>
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