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<div><font face="Calibri,sans-serif">Hello All,</font></div>
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<div><font face="Calibri,sans-serif">At the CUNY ASRC NanoFab, we have a EVG 620 mask aligner with 6” and 4” wafer tooling. We have a number of users who need to process chips of varying sizes. In some cases, users need the flexibility to move the chip across
the mask. As I am sure you are familiar, many researchers have several chip layers across one photomask. </font></div>
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<div><font face="Calibri,sans-serif">It seems as though EVG’s tooling options for chips are fairly limited with less flexibility than I have seen with SUSS chucks in the past. I am curious what other EVG mask aligner owners do to accommodate users who need
to perform lithography on chips. Have you made your own custom tooling? Any thoughts would be greatly appreciated. </font></div>
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<div><font face="Calibri,sans-serif">Best regards,</font></div>
<div><font face="Calibri,sans-serif">Jacob</font></div>
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<b><i><span style="font-family: Calibri, sans-serif;">Jacob Trevino, PhD</span></i></b><span style="font-family: Calibri, sans-serif;"><span class=""><br>
NanoFabrication Facility Director<br>
The City University of New York (CUNY)<br>
Advanced Science Research Center (ASRC)<br>
</span>Tel. <a href="tel:%28212%29%20413-3310" value="+12124133310" target="_blank">(212) 413-3310</a><u></u><u></u></span></p>
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<span style="font-family: Calibri, sans-serif;">Cel. <a href="tel:%28646%29%20629-1179" value="+16466291179" target="_blank">(646) 629-1179</a></span></p>
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<span style="font-family: Calibri, sans-serif;">Email: <a href="mailto:Jacob.Trevino@asrc.cuny.edu" target="_blank">Jacob.Trevino@asrc.cuny.edu</a><u></u><u></u></span></p>
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<span style="font-family: Calibri, sans-serif;">Web: <a href="http://asrc.cuny.edu/" target="_blank">http://asrc.cuny.edu/</a></span></p>
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