<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.5in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
span.EmailStyle17
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:256913355;
mso-list-type:hybrid;
mso-list-template-ids:1499234690 67698705 67698713 67698715 67698703 67698713 67698715 67698703 67698713 67698715;}
@list l0:level1
{mso-level-text:"%1\)";
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level4
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level7
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hi Jacob,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Like you we have quite a few users who work with small pieces and also use EVG620 aligners. I would guess we see more chip lithography than full wafer lithography.
Over the years there have been a couple of techniques developed to deal with this.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><span style="mso-list:Ignore">1)<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">The first involves using wide cleanroom tape to cover a 4” (or 2”) vacuum chuck. Small holes are then poked in the vacuum grooves near where the sample
needs to be placed. This was the technique of choice for quite some time. Often the vacuum hold is not very good however and overlaps in the tape can cause many issues.<br>
<br>
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><span style="mso-list:Ignore">2)<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Recently a group of users came up with another option that I personally think works quite well. This involves using a 4” Si wafer as a carrier. Personally
I have had success using the unpolished backside of the wafer. A small amount of water is placed on the surface (we use a pipette) to create a very thin film. The sample is then placed on the carrier and the water film adheres the sample to the carrier, keeping
it in place during alignment and exposure. It is the same idea as sticking two glass slides together with a drop of water. The key is to limit the amount of water, too much and the sample will simply slide around.<br>
<br>
The beauty of this technique is that the sample can be placed anywhere on the carrier. Additionally, the carrier can be marked or scribed to denote the position where the samples need to go for each mask level. The next time the user needs to run the mask they
can easily locate where the sample should go. You could go even further and mask and coat a carrier wafer with a grid or location reference for a more exact “fixture”.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">With either of the above options the user must still be careful to roughly align the sample on the carrier to ensure that there is enough travel in the stage
to do alignment. Dealing with small pieces is never going to be as easy as full wafers but we’ve found that the techniques above do take quite a bit of the pain out of the ordeal.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">If you are doing many samples (ie. small production quantities) actual tooling would probably be a better option. For the small, occasional runs that many researchers
and students are doing those these are a very low cost and simple way to get reasonable results using small pieces.<br>
<br>
If you need any more details please let me know.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">-Dave<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#BB0000;background:white">Dave Hollingshead </span></b><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#333333"><br>
<span style="background:white">Research Engineer<br>
<b>The Ohio State University</b><br>
</span></span><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#BB0000;background:white">Ohio Sensor and Semiconductor Innovation Platform</span><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#333333;background:white"> </span><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#333333"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#333333;background:white">Nanotech West Lab</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#333333;background:white">Suite 100, 1381 Kinnear Road, Columbus, OH 43212</span><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#333333"><br>
<span style="background:white">614.292.1355 Office</span><br>
</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#333333"><a href="mailto:hollingshead.19@osu.edu"><span style="font-size:9.0pt;font-family:"Arial","sans-serif";background:white">hollingshead.19@osu.edu</span></a></span><span style="font-size:9.0pt;font-family:"Arial","sans-serif";color:#333333;background:white"> </span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#333333"><a href="http://osu.edu/"><span style="font-size:9.0pt;font-family:"Arial","sans-serif";background:white">osu.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Fouad Karouta<br>
<b>Sent:</b> Tuesday, February 16, 2016 5:25 PM<br>
<b>To:</b> Jacob Trevino; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Chips on a EVG 620<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hi Jacob,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Indeed the EVG 620 is not as flexible as the Suss MA6 for instance. We do have an EVG620 and similarly to your case we have people working with
small samples and therefore we purchased a mask chuck with a 55mm dia opening allowing user to position the mask to the desired pattern. You need the chuck and the corresponding loading frame. In parallel you also need to have a sample chuck holder for small
pieces. We do have one for 2” (EVG said it works for small pieces) but due to the vacuum grooves working with 10x10 mm2 sample will not give you the best resolution as sample cannot be clamped with vacuum. Maybe EVG offers now more suitable chuck for small
pieces. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Along all these hardware tools you also need a software upgrade (service visit) to include these parts in the software. A rather expensive upgrade.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Let me know if you need more details on this that we do it outside the labnetowrk.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Kind regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">ANFF ACT Node Manager<o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"></a><span lang="EN-AU" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Jacob Trevino<br>
<b>Sent:</b> Wednesday, 17 February 2016 1:06 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Chips on a EVG 620<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif"">Hello All,</span><span lang="EN-AU"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif"">At the CUNY ASRC NanoFab, we have a EVG 620 mask aligner with 6” and 4” wafer tooling. We have a number of users who need to process chips of varying sizes. In some cases, users
need the flexibility to move the chip across the mask. As I am sure you are familiar, many researchers have several chip layers across one photomask. </span><span lang="EN-AU"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif"">It seems as though EVG’s tooling options for chips are fairly limited with less flexibility than I have seen with SUSS chucks in the past. I am curious what other EVG mask aligner
owners do to accommodate users who need to perform lithography on chips. Have you made your own custom tooling? Any thoughts would be greatly appreciated. </span><span lang="EN-AU"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif"">Best regards,</span><span lang="EN-AU"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif"">Jacob</span><span lang="EN-AU"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-AU" style="font-size:13.5pt;font-family:"Calibri","sans-serif";color:black">-------------------------------- </span><span lang="EN-AU" style="font-size:11.5pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><i><span lang="EN-AU" style="font-family:"Calibri","sans-serif";color:black">Jacob Trevino, PhD</span></i></b><span lang="EN-AU" style="font-family:"Calibri","sans-serif";color:black"><br>
NanoFabrication Facility Director<br>
The City University of New York (CUNY)<br>
Advanced Science Research Center (ASRC)<br>
Tel. </span><span lang="EN-AU"><a href="tel:%28212%29%20413-3310" target="_blank"><span style="font-family:"Calibri","sans-serif"">(212) 413-3310</span></a><span style="color:black"><o:p></o:p></span></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif";color:black">Cel. </span><span lang="EN-AU"><a href="tel:%28646%29%20629-1179" target="_blank"><span style="font-family:"Calibri","sans-serif"">(646) 629-1179</span></a><span style="color:black"><o:p></o:p></span></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif";color:black">Email: </span><span lang="EN-AU"><a href="mailto:Jacob.Trevino@asrc.cuny.edu" target="_blank"><span style="font-family:"Calibri","sans-serif"">Jacob.Trevino@asrc.cuny.edu</span></a><span style="color:black"><o:p></o:p></span></span></p>
<p class="MsoNormal"><span lang="EN-AU" style="font-family:"Calibri","sans-serif";color:black">Web: </span><span lang="EN-AU"><a href="http://asrc.cuny.edu/" target="_blank"><span style="font-family:"Calibri","sans-serif"">http://asrc.cuny.edu/</span></a><span style="color:black"><o:p></o:p></span></span></p>
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