<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto"><div>Rick,</div><div id="AppleMailSignature"><br></div><div id="AppleMailSignature">We have a new Gen3 MA6 with backside align from Suss MicroTec. Uptime/reliability is excellent and post sales support has been as well. The system is PM'd twice annually by Suss. </div><div id="AppleMailSignature"><br></div><div id="AppleMailSignature">Imaging quality is standard for a mask aligner. My staff don't have to do much to get illumination uniformity less than +/- 2.5% over 150 mm after a lamp change (1000 W light source). We mainly use the system for 100 mm wafer, piece work and some 150 mm processing. </div><div id="AppleMailSignature"><br></div><div id="AppleMailSignature">All thumbs-up here at Penn.</div><div id="AppleMailSignature"><br></div><div id="AppleMailSignature">Best,</div><div id="AppleMailSignature">Noah</div><div id="AppleMailSignature"><br></div><div id="AppleMailSignature">University of Pennsylvania </div><div id="AppleMailSignature">Philadelphia, PA<br><br>Sent from my iPhone</div><div><br>On Apr 1, 2016, at 14:54, Morrison, Richard H., Jr. <<a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a>> wrote:<br><br></div><blockquote type="cite"><div>
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<p class="MsoNormal">HI,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">This group was very helpful when Draper purchased a DRIE tool last year. I would like to tap your collective opinions on a new topic Mask Aligners.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have narrowed our search down to Suss vs Neutronix/Quintel. I am looking for feedback on spare parts and out of warranty service. Process wish the tools are very similar.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks in advance for any help you can offer.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Draper <o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge Ma, 02139-3563<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></p>
<p class="MsoNormal"><a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></p>
<p class="MsoNormal">W 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">C 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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