<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=iso-8859-1"><meta name=Generator content="Microsoft Word 15 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 90.0pt 72.0pt 90.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=FR-CA link="#0563C1" vlink="#954F72"><div class=WordSection1><p class=MsoNormal><span lang=EN-CA>Hello All, <o:p></o:p></span></p><p class=MsoNormal><span lang=EN-CA>I’ve been asked to deposit MgF2 in our Ebeam evaporation tool. According to suppliers, MgF2 is excellent by Ebeam evaporation with graphite crucible. My concern is about contamination and how to clean this. We usually deposit Oxides and Metals in our Ebeam (Au, Cr, SiO2, TiO2….).<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-CA>If you have any experience to share, that will be appreciated!<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-CA><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-CA>Thank you<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-CA>Christophe<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-CA><o:p> </o:p></span></p><p class=MsoNormal><b><i><span style='font-size:12.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:FR-CA'>Christophe Clément</span></i></b><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>Technicien laboratoire</span></b><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>Laboratoire de microfabrication (LMF)</span><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca"><span style='color:#0563C1'>www.gcmlab.ca</span></a></u></span><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>Ecole Polytechnique de Montréal </span><span style='mso-fareast-language:FR-CA'><a href="http://www.polymtl.ca/"><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray'>www.polymtl.ca</span></a><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>Département de génie physique </span><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA'>*</span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA'> </span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>2900 Boulevard Edouard Monpetit</span><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>Pavillon JAB<br>Campus de l'Université de Montréal<br>Montréal (Québec) H3T 1J4</span><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'><br></span><span style='font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA'>8</span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA'> </span><span style='mso-fareast-language:FR-CA'><a href="mailto:christophe.clement@polymtl.ca"><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:blue'>christophe.clement@polymtl.ca</span></a><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA'>(</span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA'> </span><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>514 340 4711</span><span style='mso-fareast-language:FR-CA'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA'>Fax : 514 340 4711 # 2417 </span><o:p></o:p></p></div></body></html>