<div dir="ltr">Keith,<div><br></div><div>I'll stick my neck out! <div><br></div><div>The UC Berkeley NanoLab uses fused silica tanks with encased heaters and ground-fault detection for our piranha baths. I am guessing your suggestion of Pyrex or an alternative borosilicate glass will raise the hackles of some Labnetwork readers. And, I cannot claim experience with the impact of borosilicate glasses, used for piranha cleans, for MOS devices.<div><br></div><div>However, I can point to a patent issued to Alameda Instruments that made H2SO4 reclaim/reprocessing systems for a number of major semiconductor manufacturers. I also have known, since boyhood the research glassblower who made their vacuum stills. The glass used was Pyrex or an alternative Duran, which is Schott's equivalent. This leads me to the conclusion H2SO4 from a pyrex still was good enough for Intel, Pyrex is probably good enough for you.</div><div><br></div><div>Having said this if there is accidental contamination via HF your Pyrex will contribute alkali and your devices will be DOA. We have seen HF contamination in our baths on a few occasions.</div><div><br></div><div>For reference see: <a href="https://www.google.com/patents/US4980032">https://www.google.com/patents/US4980032</a></div><div><br></div><div>Bob Hamilton</div></div></div><div><br></div><div>PS Caveat emptor! Corning now uses the term Pyrex for a broader number of glasses than their traditional 7740.</div></div><div class="gmail_extra"><br clear="all"><div><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div><div><div><div><div><br>Robert Hamilton<br></div>University of CA, Berkeley<br>Marvell NanoLab Equipment Manager<br></div>Rm 520 Sutardja Dai Hall, MC 1754<br></div>Berkeley, CA 94720<br></div>Phone 510-809-8618 (desk - preferred)<br></div>Mobile 510-325-7557 (my personal mobile)<br></div>E-mail preferred: <a href="mailto:bob@eecs.berkeley.edu" target="_blank">bob@eecs.berkeley.edu</a><br><a href="http://nanolab.berkeley.edu/" target="_blank">http://nanolab.berkeley.edu/</a></div><div dir="ltr"><br></div><div dir="ltr"><br><div><div><div><div><div><div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div>
<br><div class="gmail_quote">On Thu, Apr 28, 2016 at 10:59 AM, Keith Franklin <span dir="ltr"><<a href="mailto:keithf@ualberta.ca" target="_blank">keithf@ualberta.ca</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div dir="ltr">Good day all,<div><br></div><div>We're currently revisiting what vessels or tanks we use for processing with hot piranha. Our most common application is for cleaning a partially filled cassette of 4" Si wafers. We typically purchase Pyrex 6944 vessel and have our glass shop cut them down to a more reasonable height. In our last purchase cycle, we noticed that the ID has changed ever so slightly and it's now challenging to squeeze our standard Entegris cassette into this vessel. We're currently looking into custom machined PVC, PP, Teflon & Quartzware, as well as off the shelf small volume tanks, etc.</div><div><br></div><div>I'm hoping to better understand what other similar labs are using for this application (& potentially 6" wafers as well). Any advice or feedback would be greatly appreciated.</div><div><br></div><div>Kind Regards,</div><div>Keith</div><div><div><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><font size="1"><u> </u> </font></div><span><font size="1"><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Keith Franklin</span></p><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Operations Manager</span><br></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">University of Alberta - nanoFAB</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4 </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><span style="white-space:pre-wrap"> </span></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><span style="white-space:pre-wrap"> </span> </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Ph: <a href="tel:780-492-0170" value="+17804920170" target="_blank">780-492-0170</a></span></p><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><span style="white-space:pre-wrap"> </span></span></font></span><br></div></div></div></div></div></div></div></div></div>
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