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/* Font Definitions */
@font-face
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panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p
{mso-style-priority:99;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
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<o:idmap v:ext="edit" data="1" />
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Keith,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> Do NOT use PVC. If the acid doesn’t eat it, the heat generated from the exothermic reaction will. This would be quite dangerous. If you have to use glass,
quartz is the best way to go. If you want to use polymer, I would highly recommend Teflon over polypropylene or polyethylene for its heat and chemical resistance, it is well worth the added cost. Keep in mind that piranha etch will reach temperatures well
over 100 Deg. C. when spiked with H2O2 and increases the corrosive properties of the sulfuric. Even though a particular material might be rated to resist high temperatures, it doesn’t mean that it will resist the abuse it will get from this etch. I have cleaned
up my share of piranha mishaps and the majority of them had to do with containers or drain traps in the sink that were PVC.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Equipment Dood<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Harvard University Center for Nanoscale systems.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Keith Franklin<br>
<b>Sent:</b> Thursday, April 28, 2016 1:59 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Piranha processing vessels<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Good day all,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We're currently revisiting what vessels or tanks we use for processing with hot piranha. Our most common application is for cleaning a partially filled cassette of 4" Si wafers. We typically purchase Pyrex 6944 vessel and have our glass
shop cut them down to a more reasonable height. In our last purchase cycle, we noticed that the ID has changed ever so slightly and it's now challenging to squeeze our standard Entegris cassette into this vessel. We're currently looking into custom machined
PVC, PP, Teflon & Quartzware, as well as off the shelf small volume tanks, etc.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I'm hoping to better understand what other similar labs are using for this application (& potentially 6" wafers as well). Any advice or feedback would be greatly appreciated.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Kind Regards,<o:p></o:p></p>
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<p class="MsoNormal">Keith<o:p></o:p></p>
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<p class="MsoNormal"><u><span style="font-size:7.5pt"> </span></u><span style="font-size:7.5pt"> </span><o:p></o:p></p>
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<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Keith Franklin</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Operations Manager</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">University of Alberta - nanoFAB</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">W1-060 ECERF Building</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">9107 - 116 Street</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Edmonton, Alberta</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Canada T6G 2V4 Ph: 780-492-0170</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ualberta.ca&d=CwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=JtVsPdXo9LMAxOQ1vE5gY9YAsBgbjGiOCY3JJnEzq5I&s=aglKQTD-5hMf-grL8GLXxIExZzmT9Lhit8wcEU6r7VU&e=" target="_blank"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> www.nanofab.ualberta.ca</a>
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