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<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Quartzware all the way!
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cheers!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Julia Aebersold, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">502-852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">http://louisville.edu/micronano/</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Robert M. HAMILTON<br>
<b>Sent:</b> Thursday, April 28, 2016 4:21 PM<br>
<b>To:</b> Keith Franklin <keithf@ualberta.ca><br>
<b>Cc:</b> Labnetwork <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Piranha processing vessels<o:p></o:p></span></p>
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<p class="MsoNormal">Keith,<o:p></o:p></p>
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<p class="MsoNormal">I'll stick my neck out! <o:p></o:p></p>
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<p class="MsoNormal">The UC Berkeley NanoLab uses fused silica tanks with encased heaters and ground-fault detection for our piranha baths. I am guessing your suggestion of Pyrex or an alternative borosilicate glass will raise the hackles of some Labnetwork
readers. And, I cannot claim experience with the impact of borosilicate glasses, used for piranha cleans, for MOS devices.<o:p></o:p></p>
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<p class="MsoNormal">However, I can point to a patent issued to Alameda Instruments that made H2SO4 reclaim/reprocessing systems for a number of major semiconductor manufacturers. I also have known, since boyhood the research glassblower who made their vacuum
stills. The glass used was Pyrex or an alternative Duran, which is Schott's equivalent. This leads me to the conclusion H2SO4 from a pyrex still was good enough for Intel, Pyrex is probably good enough for you.<o:p></o:p></p>
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<p class="MsoNormal">Having said this if there is accidental contamination via HF your Pyrex will contribute alkali and your devices will be DOA. We have seen HF contamination in our baths on a few occasions.<o:p></o:p></p>
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<p class="MsoNormal">For reference see: <a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__www.google.com_patents_US4980032&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=8qLrMDxvCESCZhAe4OsAWoJ3GWZ0motjIr9tjKVR6Ts&s=zlQU_MR8m65c1YuFcIQnrJ2MF4qyqh8_nKd47J3ml-0&e="><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> https://www.google.com/patents/US4980032</a><o:p></o:p></p>
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<p class="MsoNormal">Bob Hamilton<o:p></o:p></p>
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<p class="MsoNormal">PS Caveat emptor! Corning now uses the term Pyrex for a broader number of glasses than their traditional 7740.<o:p></o:p></p>
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<p class="MsoNormal"><br>
Robert Hamilton<o:p></o:p></p>
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<p class="MsoNormal">University of CA, Berkeley<br>
Marvell NanoLab Equipment Manager<o:p></o:p></p>
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<p class="MsoNormal">Rm 520 Sutardja Dai Hall, MC 1754<o:p></o:p></p>
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<p class="MsoNormal">Berkeley, CA 94720<o:p></o:p></p>
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<p class="MsoNormal">Phone 510-809-8618 (desk - preferred)<o:p></o:p></p>
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<p class="MsoNormal">Mobile 510-325-7557 (my personal mobile)<o:p></o:p></p>
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<p class="MsoNormal">E-mail preferred: <a href="mailto:bob@eecs.berkeley.edu" target="_blank">
bob@eecs.berkeley.edu</a><br>
<a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__nanolab.berkeley.edu_&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=8qLrMDxvCESCZhAe4OsAWoJ3GWZ0motjIr9tjKVR6Ts&s=W2jAw7UgPi3215VTj9D3eyW90TbFEljr0hZ3VVUEcx4&e=" target="_blank"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> http://nanolab.berkeley.edu/</a><o:p></o:p></p>
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<p class="MsoNormal">On Thu, Apr 28, 2016 at 10:59 AM, Keith Franklin <<a href="mailto:keithf@ualberta.ca" target="_blank">keithf@ualberta.ca</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal">Good day all,<o:p></o:p></p>
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<p class="MsoNormal">We're currently revisiting what vessels or tanks we use for processing with hot piranha. Our most common application is for cleaning a partially filled cassette of 4" Si wafers. We typically purchase Pyrex 6944 vessel and have our glass
shop cut them down to a more reasonable height. In our last purchase cycle, we noticed that the ID has changed ever so slightly and it's now challenging to squeeze our standard Entegris cassette into this vessel. We're currently looking into custom machined
PVC, PP, Teflon & Quartzware, as well as off the shelf small volume tanks, etc.<o:p></o:p></p>
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<p class="MsoNormal">I'm hoping to better understand what other similar labs are using for this application (& potentially 6" wafers as well). Any advice or feedback would be greatly appreciated.<o:p></o:p></p>
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<p class="MsoNormal">Kind Regards,<o:p></o:p></p>
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<p class="MsoNormal">Keith<o:p></o:p></p>
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<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Keith Franklin</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Operations Manager</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph:
<a href="tel:780-492-0170" target="_blank">780-492-0170</a></span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ualberta.ca&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=8qLrMDxvCESCZhAe4OsAWoJ3GWZ0motjIr9tjKVR6Ts&s=BRDbMUfvY6S-C1g0gBrJsjrgUkyb_6gvq80zk_FHYVI&e=" target="_blank"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> www.nanofab.ualberta.ca</a>
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