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<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK">Keith,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK">Here below are the information of chemical bath which we are using. Hope it can help you.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">We have the following Chemical Baths which are purchased from PCT system and Imtec. All product information can be found from PCT system website http://pctsystems.com/products/process-tanks
and Imtec website http://www.imtecacculine.com/heated-stainless-steel-tanks.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">1. PCT’s Tiger Tank Quartz Constant Temperature Bath, TT4 for Sulfuric Acid<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">Features<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-High-purity virgin quartz liner, molded or GE124<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-Excellent sealing integrity<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-Available in all standard single- or dual-cassette sizes and custom sizes -Greater reliability, longer life, and superior operational characteristics -Improved
safety features -Time-proven in line heater element design -Fire-retardant housing (and FM4910 approved materials) -Improved flange design -Redundant over temperature sensors – TCs (2) and Snap Switch -Superior insulation<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">2. Tiger Tank™—Nitride Etch (TTN)<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">Features<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-High reliable quartz tank design<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-Hydroseal washer standard on all TTN baths for longer RTV seal life -Manual or Auto-lid configurations (side and end configurations) -190°C temperature operation,
higher temperatures available on custom baths -Liquid Level Sensors -Dual Panel flow meter for DI water drip and cooling water control -RTD Temperature Sensors -TC and Snap Switch over-temperature device<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">3. Tiger Tank™ Filtered Recirculating Baths (TTF) for Aluminum Etch Features -Single-vessel design with direct chemistry heating -No swamping of the weir area during
boat placement -Most rugged and durable unit of its kind -Available in standard sizes<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-Single- or dual-cassette configuration for up to 300mm<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">4. Tiger Tank™—Stainless Steel for MS2001 Solvent Features<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-FM4910 or stainless steel housings<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D">-316, 324 or 304 EP Stainless steel construction -Heated tanks up to 150°C -fabricated from a single sheet of material providing the smoothest and purest material
surface available.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK">Jeff CHUNG, Wing Leong<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK">Engineer, NFF HKUST<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK"><a href="http://www.nff.ust.hk">www.nff.ust.hk</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1F497D;mso-fareast-language:ZH-HK"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Paolini, Steven<br>
<b>Sent:</b> Friday, April 29, 2016 4:05 AM<br>
<b>To:</b> Keith Franklin; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Piranha processing vessels<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Keith,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> Do NOT use PVC. If the acid doesn’t eat it, the heat generated from the exothermic reaction will. This would be quite dangerous. If you have
to use glass, quartz is the best way to go. If you want to use polymer, I would highly recommend Teflon over polypropylene or polyethylene for its heat and chemical resistance, it is well worth the added cost. Keep in mind that piranha etch will reach temperatures
well over 100 Deg. C. when spiked with H2O2 and increases the corrosive properties of the sulfuric. Even though a particular material might be rated to resist high temperatures, it doesn’t mean that it will resist the abuse it will get from this etch. I have
cleaned up my share of piranha mishaps and the majority of them had to do with containers or drain traps in the sink that were PVC.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Equipment Dood<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Harvard University Center for Nanoscale systems.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Keith Franklin<br>
<b>Sent:</b> Thursday, April 28, 2016 1:59 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Piranha processing vessels<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Good day all,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">We're currently revisiting what vessels or tanks we use for processing with hot piranha. Our most common application is for cleaning a partially filled cassette of 4" Si wafers. We typically purchase Pyrex 6944 vessel
and have our glass shop cut them down to a more reasonable height. In our last purchase cycle, we noticed that the ID has changed ever so slightly and it's now challenging to squeeze our standard Entegris cassette into this vessel. We're currently looking
into custom machined PVC, PP, Teflon & Quartzware, as well as off the shelf small volume tanks, etc.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">I'm hoping to better understand what other similar labs are using for this application (& potentially 6" wafers as well). Any advice or feedback would be greatly appreciated.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Kind Regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Keith<o:p></o:p></span></p>
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<p class="MsoNormal"><u><span lang="EN-US" style="font-size:7.5pt"> </span></u><span lang="EN-US" style="font-size:7.5pt"> </span><span lang="EN-US"><o:p></o:p></span></p>
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<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Keith Franklin</span><span lang="EN-US" style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Operations Manager</span><span lang="EN-US" style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">University of Alberta - nanoFAB</span><span lang="EN-US" style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">W1-060 ECERF Building</span><span lang="EN-US" style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">9107 - 116 Street</span><span lang="EN-US" style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Edmonton, Alberta</span><span lang="EN-US" style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black">Canada T6G 2V4 Ph: 780-492-0170</span><span lang="EN-US" style="font-size:7.5pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:7.5pt;font-family:"Arial","sans-serif";color:black"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ualberta.ca&d=CwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=JtVsPdXo9LMAxOQ1vE5gY9YAsBgbjGiOCY3JJnEzq5I&s=aglKQTD-5hMf-grL8GLXxIExZzmT9Lhit8wcEU6r7VU&e=" target="_blank"><b><span style="color:red">The
MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</span></b> www.nanofab.ualberta.ca</a>
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