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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Hi Keith,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Here at the CNST NanoFab, we have installed a master 4 pin rotor and have inserts for 2”, 3”, 4”, 6”, and 8” wafers as well as 5” and 6” masks. We have this
installed on 3 double stack SRDs with one rotor set for each stack. Over time, we have found that removing and replacing rotors to accommodate different substrate sizes caused quite a bit of damage to the SRD and galled the end of the rotor shafts. Plus,
we only had staff changing rotors which became time consuming. Now, users change their own rotors and it takes about 30 seconds. I’m a big fan! We purchased our setup from OEM Group. Feel free to give me a call or email if you would like to discuss.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Best Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Jerry<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">*******************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Jerry Bowser<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Assistant Manager for Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">NanoFab Operations Group<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Center for Nanoscale Science and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D">Phone: (301) 975-8187<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Verdana",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Keith Franklin<br>
<b>Sent:</b> Saturday, April 30, 2016 5:36 PM<br>
<b>To:</b> Labnetwork <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] SRD inserts<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Good afternoon all,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Our lab currently supports 6" round, 4" round & 4" square substrates & are looking into efficient ways of easy start to finish processing. Has anyone here used SRD rotor inserts? Having learnt many years ago that allowing our users to
freely change rotors was (ahem) unwise, we currently have multiple SRD's in each wet processing area, each configured for a different substrate geometry. Based on usage, this is not an efficient use of space, and increases the overall cost of operation (meaning
more things to maintain and repair).<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We are currently entertaining the idea of having one SRD per wet processing area configured with a 6" round rotor, and purchasing "balanced inserts" that would then fit the appropriate cassette. For reasons mentioned above, this is extremely
attractive to us. After engaging with the vendor (in this case Sitek), I was surprised to see the cost is quite significant.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I would value any input, advice or feedback any of you may be able to provide.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Kind Regards,<o:p></o:p></p>
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<p class="MsoNormal">Keith<br clear="all">
<o:p></o:p></p>
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<p class="MsoNormal"><u><span style="font-size:7.5pt"> </span></u><span style="font-size:7.5pt"> </span><o:p></o:p></p>
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<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Keith Franklin</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Operations Manager</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph: 780-492-0170</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.nanofab.ualberta.ca" target="_blank">www.nanofab.ualberta.ca</a>
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