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<div>Hi All,</div>
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<div>I just recently had a user request to sputter YBCO in one of our sputter systems. This sputter system is mainly used for the deposition of pure metal films (Al, Ti, Nb) and occasionally some reactive sputtering with metal targets. The system typically
sits with a base pressure in the low 10-7 Torr range. I don’t have any experience with YBCO I’m wondering if anyone can share some knowledge about any possible health or contamination risks associated with this material. Also, any thoughts about how to group
or segregate this process to run it safely would be great!</div>
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<div>Thank you,</div>
<div> -Nathan</div>
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<div>-- </div>
<div>Nathan Nelson-Fitzpatrick PhD</div>
<div>Nanofabrication Process Engineer</div>
<div>Quantum NanoFab</div>
<div>University of Waterloo</div>
<div>200 University Avenue West</div>
<div>Waterloo, ON Canada N2L 3G1</div>
<div>Ph: +1 519-888-4567 ext. 31796</div>
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