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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hello Linda,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Last time we purchased ZEP-520 was back in May 2014. We got it from Marubeni
<a href="http://www.marubeni.com/">http://www.marubeni.com/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">We have actually stopped using ZEP-520 due to the very high price. Instead, we have switched to AR-P C-6200 from Allresist GmbH
<a href="http://www.allresist.com/csar-62-ar-p-6200/">http://www.allresist.com/csar-62-ar-p-6200/</a>. If you are interested, we can provide you with more process details about this resist.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Another alternative would be the gL-2000 from Gluon Lab, which we purchased through Fine Material System Inc in Japan. We have tested this resist
once, but we are not using it routinely in the lab. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Leif<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Linda Macks<br>
<b>Sent:</b> 28. maj 2016 02:15<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] ZEP-520A7 e-beam resist<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<div id="divtagdefaultwrapper">
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">Hello labnetworkers,<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone knows of a supplier who can deliver to Australia, I would appreciate contact details.<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">Many thanks,<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black">Linda<o:p></o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
<p style="background:white"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><strong><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Dr Linda Macks</span></strong><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Facility Manager, ANFF-NSW<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Australian National Fabrication Facility<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black"> <o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">School of Electrical Engineering & Telecommunications<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">University of New South Wales<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">UNSW Sydney NSW 2052<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Australia<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Phone: +61 (2) 9385 7845<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Fax: +61(2) 9385 5114<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Email:
<a href="mailto:linda.macks@unsw.edu.au" id="LPNoLP">linda.macks@unsw.edu.au</a><o:p></o:p></span></p>
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