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<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Linda, Leif et al<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">FYI
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">GL-2000 has been discontinued recently and is no longer available through Gluon Lab. They claim to be working on other high-performance resists, but give no
specifics at this time. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Peter J Duda</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Technical Manager, Pritzker Nanofabrication Facility</span><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Institute for Molecular Engineering</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Chicago</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">5640 South Ellis Avenue<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ERC LL178<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Chicago, IL 60637</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Office: 773-702-8903<br>
Pager/Text: 773-652-0480</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">duda@uchicago.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ime.uchicago.edu</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Leif Johansen<br>
<b>Sent:</b> Monday, May 30, 2016 3:52 AM<br>
<b>To:</b> 'Linda Macks' <linda.macks@unsw.edu.au>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] ZEP-520A7 e-beam resist<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hello Linda,
</span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Last time we purchased ZEP-520 was back in May 2014. We got it from Marubeni
<a href="http://www.marubeni.com/">http://www.marubeni.com/</a></span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We have actually stopped using ZEP-520 due to the very high price. Instead, we have switched to AR-P C-6200 from Allresist GmbH
<a href="http://www.allresist.com/csar-62-ar-p-6200/">http://www.allresist.com/csar-62-ar-p-6200/</a>. If you are interested, we can provide you with more process details about this resist.
</span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Another alternative would be the gL-2000 from Gluon Lab, which we purchased through Fine Material System Inc in Japan. We have tested this resist once, but we
are not using it routinely in the lab. </span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Best regards,
</span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Leif</span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="DA"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Direct +45 45255713
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:EN-GB">Mobile +45 25348992</span><o:p></o:p></p>
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<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="DA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span lang="DA"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Linda Macks<br>
<b>Sent:</b> 28. maj 2016 02:15<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] ZEP-520A7 e-beam resist</span><span lang="DA"><o:p></o:p></span></p>
</div>
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<p class="MsoNormal"><span lang="DA"> <o:p></o:p></span></p>
<div id="divtagdefaultwrapper">
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">Hello labnetworkers,</span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone knows of a supplier who can deliver to Australia, I would appreciate contact details.</span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">Many thanks,</span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">Linda</span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><o:p></o:p></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><strong><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Dr Linda Macks</span></strong><span lang="DA"><o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">UNSW Sydney NSW 2052</span><span lang="DA"><o:p></o:p></span></p>
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