<div dir="ltr">Hi,<div><br></div><div>I have a related question about ebeam resist. I have been using AquaSAVE as anticharging layer for ebeam lithography.</div><div>However, I can't seem to find the distributor which will sell AquaSAVE in US</div><div><br></div><div>Do you have any information about how to get AquaSAVE from US or any replacement for AquaSAVE?</div><div><br></div><div>Thanks in advance.</div><div><br></div><div>Edmond</div></div><div class="gmail_extra"><br><div class="gmail_quote">On Tue, May 31, 2016 at 9:01 AM, Peter J Duda III <span dir="ltr"><<a href="mailto:duda@uchicago.edu" target="_blank">duda@uchicago.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
<div lang="EN-US" link="blue" vlink="purple">
<div>
<p class="MsoNormal"><a name="m_3821515471368080161__MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Linda, Leif et al<u></u><u></u></span></a></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">FYI
<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">GL-2000 has been discontinued recently and is no longer available through Gluon Lab. They claim to be working on other high-performance resists, but give no
specifics at this time. <u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><u></u> <u></u></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Thanks<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Peter J Duda</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Technical Manager, Pritzker Nanofabrication Facility</span><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Institute for Molecular Engineering</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">University of Chicago</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">5640 South Ellis Avenue<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">ERC LL178<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Chicago, IL 60637</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Office: <a href="tel:773-702-8903" value="+17737028903" target="_blank">773-702-8903</a><br>
Pager/Text: <a href="tel:773-652-0480" value="+17736520480" target="_blank">773-652-0480</a></span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><a href="mailto:duda@uchicago.edu" target="_blank">duda@uchicago.edu</a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><a href="http://ime.uchicago.edu" target="_blank">ime.uchicago.edu</a></span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><u></u><u></u></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"><u></u> <u></u></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Leif Johansen<br>
<b>Sent:</b> Monday, May 30, 2016 3:52 AM<br>
<b>To:</b> 'Linda Macks' <<a href="mailto:linda.macks@unsw.edu.au" target="_blank">linda.macks@unsw.edu.au</a>>; <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] ZEP-520A7 e-beam resist<u></u><u></u></span></p>
</div>
</div><div><div class="h5">
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Hello Linda,
</span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Last time we purchased ZEP-520 was back in May 2014. We got it from Marubeni
<a href="http://www.marubeni.com/" target="_blank">http://www.marubeni.com/</a></span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">We have actually stopped using ZEP-520 due to the very high price. Instead, we have switched to AR-P C-6200 from Allresist GmbH
<a href="http://www.allresist.com/csar-62-ar-p-6200/" target="_blank">http://www.allresist.com/csar-62-ar-p-6200/</a>. If you are interested, we can provide you with more process details about this resist.
</span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Another alternative would be the gL-2000 from Gluon Lab, which we purchased through Fine Material System Inc in Japan. We have tested this resist once, but we
are not using it routinely in the lab. </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Best regards,
</span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d">Leif</span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
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<tbody>
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<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">Leif S. Johansen
</span></b><u></u><u></u></p>
</td>
</tr>
<tr>
<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#9b9b9b">Head of Operations</span><u></u><u></u></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">DTU Danchip
</span><u></u><u></u></p>
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</span><u></u><u></u></p>
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<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">Technical University of Denmark</span></b><u></u><u></u></p>
</td>
<td width="50" rowspan="7" valign="top" style="width:37.5pt;padding:6.0pt 0in 0in 0in">
<p class="MsoNormal" align="right" style="text-align:right"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black"><img border="0" width="36" height="53" src="cid:image001.gif@01D1BB1A.F6A901B0" alt="http://www.dtu.dk/images/DTU_email_logo_01.gif"></span><u></u><u></u></p>
</td>
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<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">Danchip
</span><u></u><u></u></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">Ørsteds Plads, Byg. 347
</span><u></u><u></u></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">2800 Lyngby
</span><u></u><u></u></p>
</td>
</tr>
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<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">Direct <a href="tel:%2B45%2045255713" value="+4545255713" target="_blank">+45 45255713</a>
</span><u></u><u></u></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black">Mobile <a href="tel:%2B45%2025348992" value="+4525348992" target="_blank">+45 25348992</a></span><u></u><u></u></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black"><a href="mailto:lesjo@danchip.dtu.dk" target="_blank">lesjo@danchip.dtu.dk</a>
</span><u></u><u></u></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.danchip.dtu.dk/" target="_blank">www.danchip.dtu.dk/</a>
</span><u></u><u></u></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1f497d"> </span><span lang="DA"><u></u><u></u></span></p>
<div>
<div style="border:none;border-top:solid #b5c4df 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Linda Macks<br>
<b>Sent:</b> 28. maj 2016 02:15<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] ZEP-520A7 e-beam resist</span><span lang="DA"><u></u><u></u></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="DA"> <u></u><u></u></span></p>
<div>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">Hello labnetworkers,</span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone knows of a supplier who can deliver to Australia, I would appreciate contact details.</span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">Many thanks,</span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black">Linda</span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
<p style="background:white"><span lang="DA" style="font-family:"Calibri",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
<div>
<div>
<div>
<p class="MsoNormal" style="background:white"><strong><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Dr Linda Macks</span></strong><span lang="DA"><u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Facility Manager, ANFF-NSW</span><span lang="DA"><u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Australian National Fabrication Facility</span><span lang="DA"><u></u><u></u></span></p>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">School of Electrical Engineering & Telecommunications</span><span lang="DA"><u></u><u></u></span></p>
</div>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">University of New South Wales</span><span lang="DA"><u></u><u></u></span></p>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">UNSW Sydney NSW 2052</span><span lang="DA"><u></u><u></u></span></p>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Australia</span><span lang="DA"><u></u><u></u></span></p>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Phone: <a href="tel:%2B61%20%282%29%209385%207845" value="+61293857845" target="_blank">+61 (2) 9385 7845</a></span><span lang="DA"><u></u><u></u></span></p>
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<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Fax: <a href="tel:%2B61%282%29%209385%205114" value="+61293855114" target="_blank">+61(2) 9385 5114</a></span><span lang="DA"><u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Email:
<a href="mailto:linda.macks@unsw.edu.au" target="_blank">linda.macks@unsw.edu.au</a></span><span lang="DA"><u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal" style="background:white"><span lang="DA" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"> </span><span lang="DA"><u></u><u></u></span></p>
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