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<div>
<div>Hi Bob,</div>
<div><br>
</div>
<div>For the most part we use cryo N2 throughout the fab for our tool pneumatics and pump purges whereas we use CDA for gas cabinet panel pneumatics. The CDA compressors serve the entire building (280,000sq.ft with a good chunk of that being lab space) in addition
to the fab. The compressor setup is maintained by the university’s Plant Operations group with which we made it a point to build an excellent relationship with early on during the building’s construction phase. We’ve also made it a point of maintaining that
relationship so they are generally very good about maintaining all systems outside of my team’s direct control but on which we are extremely dependent.</div>
<div><br>
</div>
<div>If it can help I’ve appended the design specs for our CDA system. I know I’m going to regret putting this in writing but we have had no CDA failures that I can recall in the four years since we took occupancy of the building.</div>
<div><br>
</div>
<div>Best,</div>
<div>Vito</div>
<div>University of Waterloo</div>
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<p><span style="font-size: 10pt; font-family: Arial, Bold;">2.8 </span><span style="font-size: 9pt; font-family: Arial, Bold;">Clean Dry Air System
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.1 System : </span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.1 duplex compressor arrangement,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.2 skid mounted, </span>
</p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.3 factory assembled and tested, with:
</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(a) desiccant air dryer,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(b) coalescing pre-filters,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(c) after-filters c/w gauge,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(d) bacteria retention filters,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(e) filter/pressure regulator,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(f) control panel, </span>
</p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(g) air compressors.
</span></p>
</li></ol>
</li></ol>
</div>
</div>
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.2 Clean Dry Air COmpressors</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.1 Two stage, water cooled, oilless rotary tooth, electric driven compressors c/w intercooler:
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.2 duplex arrangement with two compressors, one to run and one standby
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.3 fitted with discharge temperature sensors mounted on each compressor and wired to shut down compressor and initiate high discharge temperature alarm if temperature rises above normal.
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.4 capacity and horsepower for each unit as follows;
</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(a) SCFM @ 130 psig 204 with 14.7 psig, 68°F inlet temp and 36%RH.
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(b) Power input 37.3kw (50HP)
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(c) Compressor model Atlas-Copco model # ZR55VSD (2 required)
</span></p>
</li></ol>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.5 after-cooler and discharge air water separator with water drain trap on each compressor. </span></p>
</li></ol>
</div>
</div>
</div>
</div>
<div>
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<p><span style="font-size: 10pt; font-family: Arial, Italic;">Standard of Acceptance
</span></p>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Class I </span></p>
</div>
</div>
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<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(a) with capacity 450 L (120 usgal)],<br>
(b) constructed of carbon steel as an unfired pressure vessel in accordance with to
</span></p>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">CSB51,<br>
(c) cylindrical tank with dished ends and supporting legs for vertical mounting, (d) designed for 1030 kPa (150 psig) working pressure,<br>
(e) fitted with; </span></p>
<ul style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">! </span><span style="font-size: 10.000000pt; font-family: 'Arial'">inlet air connection
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">! </span><span style="font-size: 10.000000pt; font-family: 'Arial'">outlet air connection
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">! </span><span style="font-size: 10.000000pt; font-family: 'Arial'">pressure relief valve
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">! </span><span style="font-size: 10.000000pt; font-family: 'Arial'">pressure gauge and
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">! </span><span style="font-size: 10.000000pt; font-family: 'Arial'">bottom drain
</span><span style="font-size: 9.000000pt; font-family: 'Arial'">with automatic drain valve.
</span></p>
</li></ul>
</div>
</div>
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<div class="column">
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.3 Air dryer system: Desiccant air dryer:
</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.1 Type: </span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(a) Factory assembled and tested, skid mounted package.
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(b) two column heatless regeneration type with automatic switching between beds,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(c) columns, heads and casings of dryer body manufactured from stainless steel,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(d) design pressure: 1030 kPa (150 psig) pressure rating,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(e) ball valves at inlet and outlet of dryer,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(f) pre-filters, after-filters and bacteria retention filters in duplex arrangement with ball
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">valves for shut-off on inlet and outlet of each filter housing.
</span></p>
</li></ol>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.2 Desiccant dryer control panel:
</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(a) 120 volt/1 phase/60 Hz control panel,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(b) panel face mounted pressure gauges, pre-wired alarm and operating sensors, relays,
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">switches, pilot lights and terminal strip for external alarm connections.
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(c) pressure gauge and pressure sensor with DISS, check valve, and nipple on outlet piping
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">from dryer package, on downstream side of after-filters and bacteria retention filters, to
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">detect "Dryer Pressure Drop High" alarm,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(d) moisture sensors, timers and switching valves and solenoid valves to control switching
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">and regeneration, </span>
</p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(e) internal self diagnostic circuitry and alarm contacts for "Dryer Switching Failure" alarm,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(f) pressure gauges between prefilter and dryer inlet, between dryer outlet and after-filters
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">and between after-filters and bacteria retention filters.
</span></p>
<p><span style="font-size: 9pt; font-family: Arial, Italic;">Standard of Acceptance
</span></p>
</li></ol>
</li></ol>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N </span>
<span style="font-size: 10.000000pt; font-family: 'Arial'">Class I </span><span style="font-size: 9.000000pt; font-family: 'Arial'">Inc. Model # MG400X1<br>
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 9.000000pt; font-family: 'Arial'">Pneumatic Products Canada (PPC)
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 9.000000pt; font-family: 'Arial'">Aimark- Travers (Hankinson)
</span></p>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.3 Performance: </span>
</p>
</div>
</div>
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<tbody>
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<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Parameter </span></p>
</div>
</div>
</td>
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<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Rating </span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Rating </span></p>
</div>
</div>
</td>
</tr>
<tr>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Desicant per bed, minimum
</span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">4.5 kg </span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(100 lb) </span></p>
</div>
</div>
</td>
</tr>
<tr>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Flowrate </span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">11328 litres/min </span>
</p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">( 400 scfm) </span>
</p>
</div>
</div>
</td>
</tr>
<tr>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Inlet pressure </span>
</p>
</div>
</div>
</td>
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<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">1030 kPa </span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(150 psig) </span></p>
</div>
</div>
</td>
</tr>
</tbody>
</table>
</div>
</div>
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<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Dewpoint temperature
</span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">-40°C </span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(-40°F) </span></p>
</div>
</div>
</td>
</tr>
</tbody>
</table>
</div>
</div>
<div><br>
</div>
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<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.4 </span></p>
</div>
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Filter / Pressure Regulator System: .1 two pre-filters,
</span></p>
</div>
</div>
<img src="cid:D0A75B25-D839-4B13-A19F-1BAF8647C1D6" alt="page550image3720" width="503.880000" height="0.840000" type="image/png">
<table style="border-collapse: collapse">
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<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Dewpoint temperature
</span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">-40°C </span></p>
</div>
</div>
</td>
<td style="border-style: solid; border-top-width: 0.840000pt; border-top-color: rgb(0.000000%, 0.000000%, 0.000000%); border-right-width: 0.840000pt; border-right-color: rgb(0.000000%, 0.000000%, 0.000000%); border-bottom-width: 0.840000pt; border-bottom-color: rgb(0.000000%, 0.000000%, 0.000000%); border-left-width: 0.840000pt; border-left-color: rgb(0.000000%, 0.000000%, 0.000000%)">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">(-40°F) </span></p>
</div>
</div>
</td>
</tr>
</tbody>
</table>
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.5 </span></p>
</div>
<div class="column">
<ol start="2" style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.2 two after-filters rated 0.01 micron filtration with an efficiency exceeding 99.9999% D.O.P.,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.3 two activated charcoal filters,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.4 filter element change indicators ,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.5 automatic drain valves except on charcoal filters, and
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.6 dual line pressure regulating assembly consisting of two pressure regulators, outlet pressure gauges, inlet and outlet isolation ball valves and pressure relief valves, located downstream of
charcoal filters, arranged so that isolation of one filter / regulator will not affect operation of second filter / regulator.
</span></p>
<p><span style="font-size: 10pt; font-family: Arial, Italic;">Standard of Acceptance
</span></p>
</li></ol>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N </span>
<span style="font-size: 10.000000pt; font-family: 'Arial'">Norgren - Excelon </span>
</p>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Pre-filters: </span>
</p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.1 high efficiency coalescing type, rated 0.01 micron filtration with an efficiency exceeding
</span></p>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">99.9999% D.O.P., </span>
</p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.2 initial (dry and clean) pressure drop of not more than 6 Kpa (0.9 psig) (1030 Kpa (150 psig) pressure rating,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.3 epoxy coated glass fibre media,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.4 NPT 1 connections, and
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.5 external automatic drain
</span></p>
<p><span style="font-size: 10pt; font-family: Arial, Italic;">Standard of Acceptance
</span><span style="font-size: 10.000000pt; font-family: 'Arial'">.<br>
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 10.000000pt; font-family: 'Arial'">Hankison 3100 Series-T100-08F -48<br>
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 10.000000pt; font-family: 'Arial'">PPC MCD-1-100-1G16 housing with POS-1001SU element
</span></p>
</li></ol>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Prefilter automatic drain:
</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.1 adjustable time cycled automatic drain,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.2 timer, adjustable for both interval and duration,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.3 direct acting, normally closed solenoid valve rated at 1030 Kpa (150 psig),
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.4 NPT 1/4 or 1⁄2 connections, and
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.5 EMAC 4 construction with adapter for 13 mm (1⁄2 in) conduit.
</span></p>
<p><span style="font-size: 10pt; font-family: Arial, Italic;">Standard of Acceptance
</span></p>
</li></ol>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N </span>
<span style="font-size: 10.000000pt; font-family: 'Arial'">Class 1 Model MG400-PF
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 10.000000pt; font-family: 'Arial'">Hankison Model 532<br>
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 10.000000pt; font-family: 'Arial'">PPC Model PDV 100
</span></p>
<ol start="6" style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.6 liquid sensor, </span>
</p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.7 direct acting, normally closed solenoid valve rated at 1030 kPa (150 psig),
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.8 NPT 1/4 or 1⁄2 connections, and
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.9 EMAC 4 construction with adapter for 13 mm (1⁄2 in) conduit.
</span></p>
<p><span style="font-size: 10pt; font-family: Arial, Italic;">Standard of Acceptance </span></p>
</li></ol>
</div>
</div>
</div>
</div>
<div>
<div class="page" title="Page 551">
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">Hankison Model 541 PPC Model IDV 2000
</span></p>
</div>
</div>
<div class="layoutArea">
<div class="column">
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.7 After-filters: </span>
</p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.1 "absolute" particulate removal type (0.9 um),
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.2 rated 0.01 micron filtration with an efficiency exceeding 99.9999% D.O.P.,
</span></p>
</li></ol>
</div>
</div>
<div class="layoutArea">
<div class="column">
<ol start="3" style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.3 initial (dry and clean) pressure drop of not more than 2 kPa (0.3 psig (1030 kPa (150 psig) pressure rating,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.4 cellulose media,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.5 stainless steel housing, and
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.6 NPT 1 connections.
</span></p>
<p><span style="font-size: 10pt; font-family: Arial, Italic;">Standard of Acceptance
</span></p>
</li></ol>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N </span>
<span style="font-size: 10.000000pt; font-family: 'Arial'">Class 1 Model MG 400-AF<br>
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 10.000000pt; font-family: 'Arial'">Hankison 3100 Series-T100-08F-48<br>
</span><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N
</span><span style="font-size: 10.000000pt; font-family: 'Arial'">PPC MCD-1-100-1G16 housing with PCS-1001AF element
</span></p>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.8 Bacteria retention filters:
</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.1 "absolute" particulate removal type (0.2 um),
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.2 initial (dry and clean) pressure drop of not more than 2 kPa (0.3 psig (1030 kPa (150 psig) pressure rating,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.3 hydrophobically treated media,
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.4 stainless steel housing, and
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.5 NPT 1 connections.
</span></p>
<p><span style="font-size: 10pt; font-family: Arial, Italic;">Standard of Acceptance
</span></p>
</li></ol>
<p><span style="font-size: 10.000000pt; font-family: 'WPTypographicSymbols'">N </span>
<span style="font-size: 10.000000pt; font-family: 'Arial'">PPC Ultipor SDL-2-AR16
</span></p>
<ol start="9" style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.9 Air intakes: </span>
</p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.1 Mufflers and filters to be mounted on each pump or compressor inlet.
</span></p>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.2 Intake filter housing to have quick release fasteners and to be rated for air flow capacity of pump or compressor with efficiency greater than 98% when challenged with 6 micron particles.
</span></p>
</li></ol>
</li><li>
<p><span style="font-size: 10.000000pt; font-family: 'Arial'">.10 </span><span style="font-size: 9.000000pt; font-family: 'Arial'">Clean Dry Air Control System:
</span></p>
<ol style="list-style-type: none">
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.1 mounted in NEM1 enclosure,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.2 programmable logic module,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.3 main disconnect switch,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.4 three variable frequency drives with bypass contactors and circuit protection for each compressor, for future.
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.5 manual-auto-off selector switches for each compressor, for future.
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.6 control transformers with primary and secondary circuit protection.
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.7 two dryer auto/off selector switches,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.8 one continuous/controlled dryer purge selector switch,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.9 internal pressure sensors and pressure switches for controlling stop/start operation of compressors,
</span></p>
</li><li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.10 duplex compressor package for future control through Allen-Bradley Series SLC 500 Programable logic controller with alternating strategy to equalize compressor run time, and coordinate automatic
back-up from stand-by unit.</span></p>
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<p><span style="font-size: 9.000000pt; font-family: 'Arial'">.12 </span></p>
</div>
<div class="column">
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">visual and audible alarms and BAS output contacts for;
</span></p>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(a) electrical overload,
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(b) com pressor high disch arge tem perature
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(c) primary control transformer failure
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(d) lag/failure alarm
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(e) dryer switching failure
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(f) dryer low discharge pressure, and
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(g) high dew point,
</span></p>
</li></ol>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">Automatic controls sequences;
</span></p>
</div>
</div>
<img src="cid:812A2017-2152-4135-A2D5-D3CDDEF835FE" alt="page552image6968" width="503.880000" height="0.840000" type="image/png">
<div class="layoutArea">
<div class="column">
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(a) start lead compressor when pressure falls to 675 kPa (98 psig)
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(b) stops lead compressor when pressure reaches 703 kPa (102 psig)
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(c) start lag compressor, when system pressure falls to 648 kPa (94 psig)
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(d) stops lag compressor, if provided, when pressure reaches 665 kPa (95 psig)
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(e) alternate assignment of compressors between lead, lag, and standby.
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(f) runs compressors together under peak demand condition with adjustable time delay (0-
</span></p>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">20 seconds) between start of lead and lag unit.
</span></p>
</li></ol>
<ol>
<li>
<p><span style="font-size: 9.000000pt; font-family: 'Arial'">(g) adjustable minimum run timer on each compressor </span></p>
</li></ol>
</div>
</div>
</div>
<p><span style="font-family: Arial; font-size: 9pt;"> </span></p>
</li></ol>
</li></ol>
</div>
</div>
</div>
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<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri" style="font-size: 14px; "><font face="Calibri,sans-serif">--</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri" style="font-size: 14px; "><font face="Calibri,sans-serif">Vito Logiudice </font>P.<font face="Calibri,sans-serif">Eng.</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri"><font face="Calibri,sans-serif" style="font-size: 14px; ">Director of Operations, Quantum NanoFab</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri"><font face="Calibri,sans-serif" style="font-size: 14px; ">University of Waterloo</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri"><font face="Calibri,sans-serif" style="font-size: 14px; ">Lazaridis QNC 1207</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri"><font face="Calibri,sans-serif" style="font-size: 14px; ">200 University Avenue West</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri"><font face="Calibri,sans-serif" style="font-size: 14px; ">Waterloo, ON Canada N2L 3G1</font></font></font></div>
<div><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri"><font face="Calibri,sans-serif" style="font-size: 14px; ">Tel.: (519) 888-4567 ext. 38703</font></font></font></div>
<div><span style="font-size: 14px; ">Email: <a href="mailto:vito.logiudice@uwaterloo.ca">vito.logiudice@uwaterloo.ca</a></span></div>
<div><span style="font-size: 14px; "><font class="Apple-style-span" color="#000000"><font class="Apple-style-span" face="Calibri"><font face="Calibri,sans-serif">Website: </font></font></font></span><a href="https://fab.qnc.uwaterloo.ca">https://fab.qnc.uwaterloo.ca</a></div>
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</div>
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<span style="font-weight:bold">From: </span><<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> on behalf of "Robert M. HAMILTON" <<a href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>><br>
<span style="font-weight:bold">Reply-To: </span>"<a href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>" <<a href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>><br>
<span style="font-weight:bold">Date: </span>Thursday, June 9, 2016 at 5:42 PM<br>
<span style="font-weight:bold">To: </span>Labnetwork <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<span style="font-weight:bold">Subject: </span>[labnetwork] Specification for clean dry air (CDA)<br>
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<div>Labnetwork Colleagues,</div>
<div><br>
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<div>I recently contacted Dennis Grimard eho is helping design and build MIT's new lab to learn their specification for their compressed dry air (CDA). Dennis is terrific with numbers and engineering data. Dennis suggested it might be useful to broaden my query
to the labnetwork. This begs the questions, how do other facilities specify their CDA and who supports their systems? </div>
<div><br>
</div>
<div>At the outset I’ll comment many university labs use their campus engineering maintenance support to service utilities and specs may not be at one’s finger tips. And, some universities have central plants for utilities which serve a broad number of facilities.
In the case of the Marvell NanoLab we have virtually all our utilities contained within our sub-fab and we have chosen to maintain most utilities e.g. our acid waste neutralization system, air handlers CDA, DI water, LN and process cooling water system because
we are so dependent on them.</div>
<div><br>
</div>
<div>My question is what are reasonable specifications for CDA? I realize this is a difficult question to answer because CDA usage will be based on an equipment load. Perhaps adding a labs square footage helps to scale an answer?</div>
<div><br>
</div>
<div>The UC Berkeley Marvell NanoFabrication lab’s CDA is derived from two Atlas Copco 117 cfm (3,32M^3/min) screw compressors operating in a lead/lag configuration which deliver to a 200 gallon storage vessel, then to an Air-Tak brand dryer and Zander particle
filters before delivery to the lab. Our CDA delivery specification is 90 psi at a dewpoint of -70F (~16 ppm H2O). We began with a dewpoint spec of -90F; however, we relaxed this spec. to reduce the work of the air dryer with wearable, moving parts. As backup,
to facilitate the orderly shutdown of equipment and for brief periods to do CDA system maintenance our delivery is configured to automatically cross over to the lab’s cryogenically derived process N2 when the pressure falls below 70 psi. Such a crossover can
support the lab for several hours using N2; however, the associated LN vessel vaporizers do not have sufficient capacity to run on cryogenically-derived N2 for extended periods of time – they ice over. </div>
<div><br>
</div>
<div>As has been previously noted, a few years ago we substituted CDA for N2 purging on a select number of dry pumps to reduce our N2 costs. The pumps switched to CDA were pumps which service equipment that does not pump acid-gases, flammables or pyrophorics.
This has been a great success. The downside; however, is we are now peaking our CDA demands to greater than a single compressor can sustain. This makes us vulnerable should we lose a compressor. </div>
<div><br>
</div>
<div>Comparing how various research fabs spec CDA has value. </div>
<div><br>
</div>
<div>Regards,</div>
<div>Bob Hamilton </div>
<div><br>
</div>
<div>
<div class="gmail_signature" data-smartmail="gmail_signature">
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<div><br>
Robert Hamilton<br>
</div>
University of CA, Berkeley<br>
Marvell NanoLab Equipment Manager<br>
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Rm 520 Sutardja Dai Hall, MC 1754<br>
</div>
Berkeley, CA 94720<br>
</div>
Phone 510-809-8618 (desk - preferred)<br>
</div>
Mobile 510-325-7557 (my personal mobile)<br>
</div>
E-mail preferred: <a href="mailto:bob@eecs.berkeley.edu" target="_blank">bob@eecs.berkeley.edu</a><br>
<a href="http://nanolab.berkeley.edu/" target="_blank">http://nanolab.berkeley.edu/</a></div>
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