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David,
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<div class="">Our 2009 Pegasus with 150 mm TDESC typically runs 40-100 mT/min leak up at 10 Torr, 10.5-12 sccm He.</div>
<div class="">Our warning is at 125 and alarm is at 150.</div>
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- Jim</div>
NIST Boulder Microfabrication Facility<br class="Apple-interchange-newline">
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<div class="">On Jun 13, 2016, at 12:03 PM, LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu" class="">dlafleur@cns.fas.harvard.edu</a>> wrote:</div>
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<div class="">To Engineers who maintain Pegasus – Rapier Systems with Esc</div>
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<div class="">Where do you set your 15 Torr leak up rate pass/fail limit for the Esc. Does anyone have success in achieving the factory spec of 50mt/min on a 150mm chuck for 15 torr @15degC ?</div>
<div class="">What is your max flow you like to see for 15 Torr?</div>
<div class="">Thanks in advance.</div>
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<div class="">David LaFleur</div>
<div class="">Equipment Engineer</div>
<div class="">Harvard University</div>
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