<html><head></head><body><div style="color:#000; background-color:#fff; font-family:HelveticaNeue, Helvetica Neue, Helvetica, Arial, Lucida Grande, sans-serif;font-size:16px"><div id="yui_3_16_0_ym19_1_1466343815494_25759"><span>Hi Michael -</span></div><div id="yui_3_16_0_ym19_1_1466343815494_25759" dir="ltr"><span id="yui_3_16_0_ym19_1_1466343815494_25904">Are you sure your gun is correctly setup to sputter magnetic materials? This usually requires removing or changing the polarity of a permanent magnet(s). With our PVD 75 a</span>t the University of Illinois, we only RF sputtered oxides so I never had to worry about this there and couldn't tell you exactly what needs to be done.</div><div id="yui_3_16_0_ym19_1_1466343815494_25759" dir="ltr"><br></div><div id="yui_3_16_0_ym19_1_1466343815494_25759" dir="ltr">Also, I've found the Lesker shield (outer, ground electrode) to be very flimsy and susceptible to distortion due to heating - especially the ring on top that sets the gap between the outer electrode and the target hold down ring. I would purchase some of these to have on hand anyway.<br></div><div id="yui_3_16_0_ym19_1_1466343815494_25759" dir="ltr"><br></div><div id="yui_3_16_0_ym19_1_1466343815494_25759" dir="ltr">Also check to make sure everything is very clean. One critical point is the top ring mentioned above. The other being where the outer electrode attaches to the gun at the bottom. These screws not only set the gap between the two electrodes but complete the ground path. </div><div id="yui_3_16_0_ym19_1_1466343815494_25759" dir="ltr"> </div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760">Also make sure there are no high spots on the pan head screws that hold down the target. The flat tip screwdriver slot is easy to get buggered up. Buy some spares of these also. </div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760"><br></div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760" dir="ltr">Also make sure there are no high spots on your target (from arcing, etc.).</div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760"><br></div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760">Finally, I would sometimes have to "cheat" to increase the gap between the two electrodes. When installing the outer electrode, don't allow the slot in the can to fully fall onto the attachment screw. Just make sure this is done evenly on all slots so the gap between the electrodes is uniform. You may want to try this early in your troubleshooting to confirm the problem is a spacing issue between electrodes. If it is the problem, you may decide to complete your urgent deposition before fixing the underlying problem. </div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760"><br></div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760">Good luck,</div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760"><br></div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760">J. Hal Romans </div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760">Senior Equipment Engineer </div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760">University of California San Diego</div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760">hromans@ucsd.edu</div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760"><br></div><div class="qtdSeparateBR" id="yui_3_16_0_ym19_1_1466343815494_25760"><br></div><div class="yahoo_quoted" id="yui_3_16_0_ym19_1_1466343815494_25766" style="display: block;"> <div style="font-family: HelveticaNeue, Helvetica Neue, Helvetica, Arial, Lucida Grande, sans-serif; font-size: 16px;" id="yui_3_16_0_ym19_1_1466343815494_25765"> <div style="font-family: HelveticaNeue, Helvetica Neue, Helvetica, Arial, Lucida Grande, sans-serif; font-size: 16px;" id="yui_3_16_0_ym19_1_1466343815494_25764"> <div dir="ltr" id="yui_3_16_0_ym19_1_1466343815494_25763"> <font size="2" face="Arial" id="yui_3_16_0_ym19_1_1466343815494_25762"> <hr size="1" id="yui_3_16_0_ym19_1_1466343815494_25761"> <b><span style="font-weight:bold;">From:</span></b> Michael Khbeis <khbeis@uw.edu><br> <b><span style="font-weight: bold;">To:</span></b> labnetwork@mtl.mit.edu <br> <b><span style="font-weight: bold;">Sent:</span></b> Saturday, June 18, 2016 9:39 PM<br> <b><span style="font-weight: bold;">Subject:</span></b> [labnetwork] NiFe 81-19 Sputtering Request<br> </font> </div> <div class="y_msg_container" id="yui_3_16_0_ym19_1_1466343815494_25797"><br><div id="yiv8113093686"><div id="yui_3_16_0_ym19_1_1466343815494_25800"><div id="yui_3_16_0_ym19_1_1466343815494_25799">Dear Colleagues</div><div id="yiv8113093686AppleMailSignature"><br></div><div id="yiv8113093686AppleMailSignature">We have an issue sputtering NiFe in our Lesker PVD75. The target runs fine for burn-in and a few runs but then can't maintain a plasma (DC 800W). </div><div id="yiv8113093686AppleMailSignature"><br></div><div id="yiv8113093686AppleMailSignature">Does anyone have an idea what causes relatively rapid failure in maintaining plasma with this specific material? I doubt the target is worn that fast. </div><div id="yiv8113093686AppleMailSignature"><br></div><div id="yiv8113093686AppleMailSignature">Also, we have a client that urgently needs some depositions. Is there a site willing to take on the task while we troubleshoot our system?</div><div id="yiv8113093686AppleMailSignature"><br></div><div id="yiv8113093686AppleMailSignature">Gratefully,<br><br><div id="yui_3_16_0_ym19_1_1466343815494_28421"><span style="">Dr. Michael Khbeis</span><div id="yui_3_16_0_ym19_1_1466343815494_28420"><span style="">Washington Nanofab Facility<br>University of Washington<br>Fluke Hall, Box 352143<br>(O) <a rel="nofollow" href="">206.543.5101</a><br>(C) <a rel="nofollow" href="">443.254.5192</a><br><a rel="nofollow" ymailto="mailto:khbeis@uw.edu" target="_blank" href="mailto:khbeis@uw.edu">khbeis@uw.edu</a></span></div></div></div></div></div><br>_______________________________________________<br>labnetwork mailing list<br><a ymailto="mailto:labnetwork@mtl.mit.edu" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br><br><br></div> </div> </div> </div></div></body></html>