<html><head></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; color: rgb(0, 0, 0); font-size: 14px; font-family: Calibri, sans-serif; "><div>Hi Lino,</div><div>I have used the LN2 method to clean out a bellows on a DRIE system. It did cause the deposits to flake off with ends capped and shaking. Per safety instruction we did this in a fume hood and disposed of deposits as hazardous waste due to toxic S2F10 etch byproducts. In hind sight if my time is worth anything it was not very cost effective. I just didn't have a spare bellows on-hand and time was a consideration.</div><div>Good luck,</div><div>Steve Pritchett</div><div>Sr Process Eng.</div><div>Utah nanofab</div><div>Ph: 801-587-0684</div><div><br></div><span id="OLK_SRC_BODY_SECTION"><div style="font-family:Calibri; font-size:11pt; text-align:left; color:black; BORDER-BOTTOM: medium none; BORDER-LEFT: medium none; PADDING-BOTTOM: 0in; PADDING-LEFT: 0in; PADDING-RIGHT: 0in; BORDER-TOP: #b5c4df 1pt solid; BORDER-RIGHT: medium none; PADDING-TOP: 3pt"><span style="font-weight:bold">From: </span> "Lino Eugene, Dr" <<a href="mailto:lino.eugene@mcgill.ca">lino.eugene@mcgill.ca</a>><br><span style="font-weight:bold">Date: </span> Monday, June 20, 2016 1:50 PM<br><span style="font-weight:bold">To: </span> "<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>" <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br><span style="font-weight:bold">Subject: </span> [labnetwork] Cleaning of cold trap from DRIE system<br></div><div><br></div><div xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><meta http-equiv="Content-Type" content="text/html; charset=us-ascii"><meta name="Generator" content="Microsoft Word 14 (filtered medium)"><style><!--
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</o:shapelayout></xml><![endif]--><div lang="EN-US" link="blue" vlink="purple"><div class="WordSection1"><p class="MsoNormal">Dear colleagues,<o:p></o:p></p><p class="MsoNormal"><o:p> </o:p></p><p class="MsoNormal">I would to know if someone has experience with cleaning of cold trap used in DRIE system.
<o:p></o:p></p><p class="MsoNormal"><o:p> </o:p></p><p class="MsoNormal">I am thinking of burning the coating in an oven but I don’t have the setup here. Any name of company doing that is welcome.<o:p></o:p></p><p class="MsoNormal"><o:p> </o:p></p><p class="MsoNormal">Thanks in advance,<o:p></o:p></p><p class="MsoNormal"><u>_______________________________________________________________________________<o:p></o:p></u></p><p class="MsoNormal"><b><span style="font-family: 'Lucida Handwriting'; ">Lino EUGENE, Ph.D., Jr. Eng.<o:p></o:p></span></b></p><p class="MsoNormal">Research assistant<o:p></o:p></p><p class="MsoNormal">McGill Nanotools - Microfab<o:p></o:p></p><p class="MsoNormal"><o:p> </o:p></p><p class="MsoNormal">Mcgill University<o:p></o:p></p><p class="MsoNormal">Rutherford Physics Building - Room 016<o:p></o:p></p><p class="MsoNormal">3600 University Street<o:p></o:p></p><p class="MsoNormal">Montreal (Quebec) Canada<o:p></o:p></p><p class="MsoNormal">H3A 2T8<o:p></o:p></p><p class="MsoNormal"><o:p> </o:p></p><p class="MsoNormal"><span lang="FR">Phone : 514 398 7329<o:p></o:p></span></p><p class="MsoNormal"><span lang="FR">Fax : 514 398 8434<o:p></o:p></span></p><p class="MsoNormal"><span lang="FR">E-mail : </span><a href="mailto:lino.eugene@mcgill.ca"><span lang="FR" style="color:blue">lino.eugene@mcgill.ca</span></a><span lang="FR"><o:p></o:p></span></p><p class="MsoNormal">Website : <a href="www.mcgill.ca/microfab/"><span style="color:blue">www.mcgill.ca/microfab/</span></a><o:p></o:p></p><p class="MsoNormal"><o:p> </o:p></p></div></div></div>
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