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<div>Hi Tzu-Min,</div>
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<div>I agree that turbo rebuilding is best left to people who are set up and have the experience in doing these repairs. I use TurboVac in Orlando Fl. I’ve been using them for many years and have never been disappointed with their work or their prices. That
goes for new turbo pumps too. Their price has never been beat when asking for multiple quotes from different vendors.</div>
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<div>Best,</div>
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<div>David LaFleur</div>
<div>RIE Equipment Engineer</div>
<div>Harvard University</div>
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<span style="font-weight:bold">From: </span>"<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>" <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Tzu-Min Ou <<a href="mailto:Tzumin.Ou@Colorado.EDU">Tzumin.Ou@Colorado.EDU</a>><br>
<span style="font-weight:bold">Reply-To: </span>"<a href="mailto:Tzumin.Ou@Colorado.EDU">Tzumin.Ou@Colorado.EDU</a>" <<a href="mailto:Tzumin.Ou@Colorado.EDU">Tzumin.Ou@Colorado.EDU</a>><br>
<span style="font-weight:bold">Date: </span>Tuesday, June 21, 2016 at 2:09 PM<br>
<span style="font-weight:bold">To: </span>Labnetwork Mailing List <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<span style="font-weight:bold">Subject: </span>[labnetwork] Turbo pump failure<br>
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<div>Good day,</div>
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<div>Just wanted to thank Utah Nanofab's hospitality and all the participants' selfless sharing. The UGIM in U. of Utah was a wonderful experience for a first-time attendee.</div>
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<div>Back to reality, the turbo pump (Leybold Turbovac 361 C with mechanical rotor suspension) on our RIE system was making a loud high-pitched sound, and the controller showed a "failure" status. This turbo pump has been on all the time for the past 2-3 years,
except for few unexpected power outage. I am curious if anyone had this kind of turbo pump failure before? What would be the possible causes of the failure?</div>
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<div>In addition to that, I am seeking some professional suggestions on how to fix it. Would you recommend to replace the bearing by the professionals, or can this be done by myself (only watched youtube video and it looked quite complicated)? I will deeply
appreciate if anyone can share the names of reliable inexpensive repairers and/or the vendors of the repair kit.</div>
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<div>Thank you,</div>
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<div>Tzu-Min</div>
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<div><font face="georgia,serif">Tzu-Min Ou, Ph.D.</font></div>
<div><font face="georgia,serif">Lab Manager</font></div>
<div><font face="georgia,serif">Colorado Nanofabrication Laboratory</font></div>
<div><font face="georgia,serif">Department of Electrical, Computer, and Energy Engineering</font></div>
<div><font face="georgia,serif">University of Colorado at Boulder</font></div>
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