<div dir="ltr">remove the polymer and do oxidation<div class="gmail_extra"><br clear="all"><div><div class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div>Thanks& regards,<br>prabhakararao</div><div><br></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">Dr. Y.P. Prabhakara Rao .M.Tech.Ph.D</font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">Chief Operating Officer </font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">National Nanofabrication centre</font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">Centre For Nanoscience and Engineering,</font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">Indian Institute Of Science,Bangalore-560012</font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">Mobile: +91 9448365748</font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">Tel: +91 80 23600129</font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc">Email: <a href="mailto:prabhakararaoyp@cense.iisc.ernet.in" target="_blank">prabhakararaoyp@cense.iisc.ernet.in</a></font></span></div><div><span style="background-color:rgb(255,255,255)"><font color="#cccccc"> <a href="mailto:prabhakararaoyp@gmail.com" target="_blank">prabhakararaoyp@gmail.com</a></font></span></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div>
<br><div class="gmail_quote">On Thu, Aug 4, 2016 at 7:17 PM, Noah Clay <span dir="ltr"><<a href="mailto:nclay@seas.upenn.edu" target="_blank">nclay@seas.upenn.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div style="word-wrap:break-word">Aaron,<div><br></div><div>We have a rather high power density oxygen barrel asher that removes Bosch polymer. If you cross-section a test device, there’s an observable difference in SEM sidewall charging pre- and post barrel ashing. You may also note the change in polymer mushrooming at the tops of features. Definitely, use low keV SEM imaging. </div><div><br></div><div>It’s been our experience that oxide will not burn off during furnace oxidation; rather, O2 will diffuse through the remaining carbonized layer.</div><div><br></div><div>Wet process alternative: EKC 265 from DuPont. <a href="http://www.dupont.com/content/dam/dupont/products-and-services/electronic-and-electrical-materials/documents/ekc/EKC265.pdf" target="_blank">http://www.dupont.com/content/dam/dupont/products-and-services/electronic-and-electrical-materials/documents/ekc/EKC265.pdf</a></div><div><br><div>
<div>Best of Luck,</div><div>Noah</div><div><br></div><div><i>Noah Clay</i></div><div><i>Director, Quattrone Nanofabrication Facility</i></div><div><i>School of Engineering & Applied Science</i></div><div><i>University of Pennsylvania</i></div><div><i>Philadelphia, PA</i></div><div><i><br></i></div><div><i>(215) 898-9308</i></div><div><i><a href="mailto:nclay@upenn.edu" target="_blank">nclay@upenn.edu</a></i></div><div><a href="https://www.linkedin.com/in/noah-clay-5073b3?trk=hp-identity-name" target="_blank">LinkedIn Profile</a></div>
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<br><div><blockquote type="cite"><div>On Aug 3, 2016, at 2:34 PM, Aaron Hryciw <<a href="mailto:ahryciw@ualberta.ca" target="_blank">ahryciw@ualberta.ca</a>> wrote:</div><br><div><div dir="ltr"><div>Dear colleagues,</div><div><br></div><div><div>Our facility recently installed a Tystar wet/dry oxidation tube, which has so far only been used to oxidise virgin Si wafers. Recently, one of our users has requested to do a 400–1000 nm wet oxidation at 1100 °C on DRIE (Bosch) etched Si wafers which still have DRIE passivation polymer on them, for the dual purpose of removing the polymer and growing an oxide. </div><div><br></div><div>Given the tool's excellent performance so far, I am concerned with the possibility of contaminating the (atmospheric) tube as the polymer is burned off, adversely affecting subsequent processes. My priority is to protect the integrity of the tool, but I also do not want to be needlessly restrictive if the presence of the polymer does not in fact pose any problem. We are a multi-user facility, with academic and industrial users who primarily do MEMS and microfluidics work (i.e., no CMOS processing).</div><div><br></div><div>My initial thought would be to have this user remove the polymer first using a dry etch (O₂ plasma), only oxidising the wafers once it has been verified that the polymer is no longer present.</div><div><br></div><div>Any advice on this matter would be greatly appreciated. Many thanks.</div><div><br></div><div>Cheers, </div><div> </div><div> – Aaron Hryciw</div></div><div><br></div><br clear="all"><div><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div><u style="font-size:x-small"> </u><span style="font-size:x-small"> </span><br></div><div><span style="font-size:12.8px"><font size="1"><div style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Aaron Hryciw, PhD, PEng</span></div><div style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Fabrication Group Manager</span><br></div><div style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent">University of Alberta - nanoFAB</span></div><div style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></div><div style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></div><div style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></div><div style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4 </span><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Ph: 780-940-7938</span></div><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca/" style="color:rgb(17,85,204)" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-family:arial;vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span></font></span><font><br></font><br></div></div></div></div></div></div></div></div></div></div></div></div>
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