<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 14 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:"Arial Narrow";
panose-1:2 11 6 6 2 2 2 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Arial Narrow","sans-serif";
color:#1F497D;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
<div class="WordSection1">
<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D">Hello Peter,<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D">I am so sorry for your situation. I hope you are able to recover quickly. I am be able to help with regards to the scrubber question. Can I ask what is
the model of scrubber and what is the media(s) that is in it? By knowing this we should be able to assess what damage may have been done to the scrubber. If you need a replacement canister, we could help you with that as well.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D">Best of luck sir.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D">Tom<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Tom Britton</span><span style="font-size:11.0pt;color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Director of Sales</span><span style="font-size:11.0pt;color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Critical Systems, Inc.</span></i><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Direct: 208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Office: 877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://www.criticalsystemsinc.com/"><i><span style="font-family:"Arial Narrow","sans-serif"">www.CriticalSystemsInc.com</span></i></a><i><u><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p></o:p></span></u></i></p>
<p class="MsoNormal"><i><u><span style="font-size:4.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></i></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><img border="0" width="196" height="38" id="Picture_x0020_1" src="cid:image001.png@01D1FC5A.601B19A0" alt="logo for email signature png"></span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Peter Köllensperger<br>
<b>Sent:</b> Monday, August 22, 2016 2:15 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Flooded ICP-RIE<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">Dear Labnetwork Members,<o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">I’ve just recently started as process group leader here at NTNU NanoLab in Trondheim, Norway, but have been following the discussions on the mailing list with interest.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">I now have a question of my own and would very much appreciate any thoughts or advice you may be able to share.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">We are currently having preventive maintenance of our ICP-RIE systems carried out by the manufacturer.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">Unfortunately one of their engineers mixed up the helium backing line with the coolant line from the chiller unit. When the chiller was switched on, it pumped ca. 1-2 litres of a water and Hexid heat transfer fluid into
the main chamber and loadlock. The system was not under vacuum at the time. The RIE section was completely filled with water and the main chamber also had water in it. The lifting pins assembly including bellows, the CM gauge the pirani gauge as well as the
He line were completely submerged.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">The engineers realised what was going on after the chiller gave a low level alarm and they saw the coolant level continue to drop. They stopped the chiller, opened the chamber, and mopped up the liquid with PIG pads and
cleanroom cloths where accessible. They then switched on both the roughing and loadlock pump.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">When the loadlock pump was switched on it died immediately. They realised that water vapour shouldn’t enter the scrubber and removed the exhaust line from the scrubber, but it is likely that some water vapour ++ entered
the scrubber as steam was coming out of the exhaust. This means the entire system has been exposed to water/coolant mix, possibly with exception of the turbo pump, although there may have been some backstreaming from the main roughing pump.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">Pumping the chamber <a href="x-apple-data-detectors://1">from Thursday</a> to the following Tuesday improved the vacuum from 1x10e-2 Torr with a leakup rate of 20 mTorr/min to 5x10e-5 Torr with a leakup rate of 5 mTorr/min.
Specification is less than 1 mTorr/min.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">Needless to say this causes a number of issues, some of which we may not even have thought to consider.</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB">In our view, the issues can be divided into immediate Health and Safety concerns, and more long term concerns regarding the performance of an ICP RIE unit that has been flooded</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoListParagraph" style="mso-margin-top-alt:0in;margin-right:0in;margin-bottom:0in;margin-left:.5in;margin-bottom:.0001pt">
<span lang="EN-GB">1. Regarding H&S issues we’re concerned about are the mixing of SF6, CHF3, Cl2 and BCl3 with water in the scrubber.</span><o:p></o:p></p>
<p class="MsoListParagraph" style="mso-margin-top-alt:0in;margin-right:0in;margin-bottom:0in;margin-left:.5in;margin-bottom:.0001pt">
<span lang="EN-GB">We will send the scrubber for a refill and check. We have contacted the vendor of the scrubber, his main concern is clogging of the granulate. Is there anything else we should pay attention to?</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoListParagraph" style="mso-margin-top-alt:0in;margin-right:0in;margin-bottom:0in;margin-left:.5in;margin-bottom:.0001pt">
<span lang="EN-GB">2. Can a chamber be sufficiently reconditioned by in situ by cleaning, baking and running plasmas or will the coolant inside necessitate a more complete disassembly and clean?</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-left:35.4pt"><span lang="EN-GB">Has anyone had a similar problem and how did you proceed? How would you suggest we ask the manufacturer to verify that there are no long-term detrimental effects on the instrument, the pumps
or the processes run on the instrument?</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"> </span><o:p></o:p></p>
<p class="MsoNormal">I'd appreciate any thoughts you may have surrounding this issue. <o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"><br>
<br>
</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="DE">Kind regards,</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="DE"> </span><o:p></o:p></p>
<p class="MsoNormal"><span lang="DE">Peter</span><o:p></o:p></p>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
</div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">––––––––––––––––––––––––––––––––––––––––––––––<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Dr. Peter A. Köllensperger<o:p></o:p></p>
</div>
</div>
<div>
<p class="MsoNormal">NTNU NanoLab<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Sem Sælandsvei 14<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Norwegian University of Science and Technology (NTNU)<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">7491 Trondheim<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
</div>
</div>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
</div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</body>
</html>