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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hi<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">The latest version of “SEMI S12-0298 Guidelines for equipment decontamination” is a great place to start. Have a team of knowledgeable users of the PECVD
and an experienced EHS person and a vendor (high haz decon company like clean harbors or triumvirate) perform a hazard review. Who ever does the deconning should use the SEMI S12 0298 guideline though.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Good luck<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">John Sweeney CIH
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Sr. Laboratory Health & Safety Officer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Harvard University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Environmental Health & Safety & Emergency Management<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">john_sweeney@harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">C 617-680-7594<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">O 617-495-1290<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Hmelo, Anthony B<br>
<b>Sent:</b> Friday, September 09, 2016 9:42 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Cc:</b> Hmelo, Anthony B<br>
<b>Subject:</b> [labnetwork] Decommissioning Silane and Phosphene Stainless Gas Delivery Lines<o:p></o:p></span></p>
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<p class="MsoNormal">All: <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">VINSE is in the process of relocating a PECVD reactor to a new cleanroom facility and I am seeking advice on the industry standards for decommissiong Silane and Phosphene stainless gas delivery lines that run from the respective gas cabinets
to the tool in its current location. Beyond thoroughly purging the lines with nitrogen flow through the tool and exhausting the purge gas through the tool exhaust, are there other considerations involved in abandoning the gas delivery lines? For example,
are the lines considered to be permanently contaminated and will they require special disposal?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Any advice on decommissioning these lines will be deeply appreciated.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">With thanks,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:black">Anthony B Hmelo, PhD<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Associate Director, VINSE<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Research Associate Professor of Physics and Astronomy<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Research Associate Professor of Materials Science and Engineering<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Vanderbilt University<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Nashville TN 37235<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="color:black">615-343-7212<o:p></o:p></span></p>
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